利用微机电系统技术制作弯曲结构表面无线无源柔性加速度计

李晨; 贾蔓谷; 洪应平; 薛亚楠; 熊继军

doi:10.1631/FITEE.2100236

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利用微机电系统技术制作弯曲结构表面无线无源柔性加速度计

常规文章 | Updated：2022-05-23

- 利用微机电系统技术制作弯曲结构表面无线无源柔性加速度计
- Wireless passive flexible accelerometer fabricated using micro-electro-mechanical system technology for bending structure surfaces
- 信息与电子工程前沿（英文） 2022年23卷第5期页码：801-809
- Affiliations：
  
  1.Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan030051, China
  2.Key Laboratory of Instrumentation Science and Dynamic Measurement, Ministry of Education, North University of China, Taiyuan030051, China
- Author bio：
  
  ‡Corresponding author
- Funds：
  
  China Aviation Development Group Industry- University-Research Cooperation Project(HFZL2020CXY019);Fundamental Research Program of Shanxi Province, China(20210302123024);National Natural Science Foundation of China(51821003)
- DOI：10.1631/FITEE.2100236
  中图分类号： TP212
- 收稿：2021-05-12，
  
  录用：2021-09-21，
  
  网络出版：2022-03-08，
  
  纸质出版：2022-05-0
- Accepted：
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李晨, 贾蔓谷, 洪应平, 等. 利用微机电系统技术制作弯曲结构表面无线无源柔性加速度计[J]. 信息与电子工程前沿（英文）, 2022,23(5):801-809.

Chen LI, Mangu JIA, Yingping HONG, et al. Wireless passive flexible accelerometer fabricated using micro-electro-mechanical system technology for bending structure surfaces[J]. Frontiers of Information Technology & Electronic Engineering, 2022, 23(5): 801-809.
李晨, 贾蔓谷, 洪应平, 等. 利用微机电系统技术制作弯曲结构表面无线无源柔性加速度计[J]. 信息与电子工程前沿（英文）, 2022,23(5):801-809. DOI： 10.1631/FITEE.2100236.

Chen LI, Mangu JIA, Yingping HONG, et al. Wireless passive flexible accelerometer fabricated using micro-electro-mechanical system technology for bending structure surfaces[J]. Frontiers of Information Technology & Electronic Engineering, 2022, 23(5): 801-809. DOI： 10.1631/FITEE.2100236.

摘要

提出一种LC无线无源柔性加速度计，解决测量弯曲结构表面加速度的困难。该加速度计由柔性聚酰亚胺（PI）衬底和平面螺旋电感（厚度为300 nm）组成，采用微机电系统（MEMS）技术，可任意弯曲或折叠，可牢固地粘附在具有弯曲结构的物体表面。利用射频无线传输原理，通过改变加速度计与天线之间的距离来测量加速度信号。与带导线的加速度计相比，该加速度计可以防止导线在振动过程中脱落，从而延长其使用寿命。通过搭建实验平台，当天线与加速度计之间的距离为5 mm时，在弯曲结构表面展示了加速度计在20至100 m/s

加速度下的传感能力。结果表明，加速度和峰峰值输出电压接近线性，加速度计灵敏度高达0.27 mV/(m·s

−

)。此外，该加速度计的最大误差小于0.037%。

Abstract

We propose an inductor-capacitor (LC) wireless passive flexible accelerometer

which eliminates the difficulty in measuring the acceleration on the surface of a bending structure. The accelerometer is composed of a flexible polyimide (PI) substrate and a planar spiral inductance coil (thickness 300 nm)

made using micro-electro-mechanical system (MEMS) technology. It can be bent or folded at will

and can be attached firmly to the surface of objects with a bending structure. The principle of radio frequency wireless transmission is used to measure the acceleration signal by changing the distance between the accelerometer and the antenna. Compared with other accelerometers with a lead wire

the accelerometer can prevent the lead from falling off in the course of vibration

thereby prolonging its service life. Through establishment of an experimental platform

when the distance between the antenna and accelerometer was 5 mm

the characterization of the surface of bending structures demonstrated the sensing capabilities of the accelerometer at accelerations of 20‒100 m/s

. The results indicate that the acceleration and peak-to-peak output voltage were nearly linear

with accelerometer sensitivity reaching 0.27 mV/(m·s

−2

). Moreover

the maximum error of the accelerometer was less than 0.037%.

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references

Benmessaoud M , Nasreddine MM , 2013 . Optimization of MEMS capacitive accelerometer . Microsyst Technol , 19 ( 5 ): 713 - 720 . doi: 10.1007/s00542-013-1741-z http://doi.org/10.1007/s00542-013-1741-z

Choi W , Ahn B , 2019 . A flexible sensor for suture training . IEEE Robot Autom Lett , 4 ( 4 ): 4539 - 4546 . doi: 10.1109/LRA.2019.2933995 http://doi.org/10.1109/LRA.2019.2933995

Dwivedi A , Khanna G , 2020 . A microelectromechanical system (MEMS) capacitive accelerometer-based microphone with enhanced sensitivity for fully implantable hearing aid: a novel analytical approach . Biomed Eng/Biomed Techn , 65 ( 6 ): 735 - 746 . doi: 10.1515/bmt-2017-0183 http://doi.org/10.1515/bmt-2017-0183

Ghemari Z , Salah S , 2018 . Piezoresistive accelerometer mathematical model development with experimental validation . IEEE Sens J , 18 ( 7 ): 2690 - 2696 . doi: 10.1109/JSEN.2018.2805764 http://doi.org/10.1109/JSEN.2018.2805764

Han JQ , Zhao ZQ , Niu WJ , et al. , 2018 . A low cross-axis sensitivity piezoresistive accelerometer fabricated by masked-maskless wet etching . Sens Actuat A Phys , 283 : 17 - 25 . doi: 10.1016/j.sna.2018.09.040 http://doi.org/10.1016/j.sna.2018.09.040

Ji YH , Tan QL , Lu X , et al. , 2019 . Wireless passive separated LC temperature sensor based on high-temperature co-fired ceramic operating up to 1500 ℃ . J Micromech Microeng , 29 ( 3 ): 035015 . doi: 10.1088/1361-6439/aafde1 http://doi.org/10.1088/1361-6439/aafde1

Lee D , Kim J , Kim H , et al. , 2018 . High-performance transparent pressure sensors based on sea-urchin shaped metal nanoparticles and polyurethane microdome arrays for real-time monitoring . Nanoscale , 10 ( 39 ): 18812 - 18820 . doi: 10.1039/C8NR05843A http://doi.org/10.1039/C8NR05843A

Lee JM , Jang CU , Choi CJ , et al. , 2016 . High-shock silicon accelerometer with a plate spring . Int J Prec Eng Manuf , 17 ( 5 ): 637 - 644 . doi: 10.1007/s12541-016-0077-x http://doi.org/10.1007/s12541-016-0077-x

Lee Y , Park J , Cho S , et al. , 2018 . Flexible ferroelectric sensors with ultrahigh pressure sensitivity and linear response over exceptionally broad pressure range . ACS Nano , 12 ( 4 ): 4045 - 4054 . doi: 10.1021/acsnano.8b01805 http://doi.org/10.1021/acsnano.8b01805

Li C , Xue YN , Jia PY , et al. , 2021 . A wireless passive vibration sensor based on high-temperature ceramic for harsh environment . J Sens , 2021 : 8875907 . doi: 10.1155/2021/8875907 http://doi.org/10.1155/2021/8875907

Lin BM , Tan QL , Zhang GJ , et al. , 2021 . Temperature and pressure composite measurement system based on wireless passive LC sensor . IEEE Trans Instrum Meas , 70 : 9502811 . doi: 10.1109/TIM.2020.3031157 http://doi.org/10.1109/TIM.2020.3031157

Ma MS , Khan H , Shan W , et al. , 2017 . A novel wireless gas sensor based on LTCC technology . Sens Actuat B Chem , 239 : 711 - 717 . doi: 10.1016/j.snb.2016.08.073 http://doi.org/10.1016/j.snb.2016.08.073

Ma MS , Wang Y , Liu F , et al. , 2019 . Passive wireless LC proximity sensor based on LTCC technology . Sensors , 19 ( 5 ): 1110 . doi: 10.3390/s19051110 http://doi.org/10.3390/s19051110

Wang C , Hou XJ , Cui M , et al. , 2020 . An ultra-sensitive and wide measuring range pressure sensor with paper-based CNT film/interdigitated structure . Sci China Mater , 63 ( 3 ): 403 - 412 . doi: 10.1007/s40843-019-1173-3 http://doi.org/10.1007/s40843-019-1173-3

Wang S , Chen GR , Niu SY , et al. , 2019 . Magnetic-assisted transparent and flexible percolative composite for highly sensitive piezoresistive sensor via hot embossing technology . ACS Appl Mater Interf , 11 ( 51 ): 48331 - 48340 . doi: 10.1021/acsami.9b16215 http://doi.org/10.1021/acsami.9b16215

Yaghootkar B , Azimi S , Bahreyni B , 2017 . A high-performance piezoelectric vibration sensor . IEEE Sens J , 17 ( 13 ): 4005 - 4012 . doi: 10.1109/JSEN.2017.2707063 http://doi.org/10.1109/JSEN.2017.2707063

Yamane D , Matsushima T , Konishi T , et al. , 2016 . A dual-axis MEMS capacitive inertial sensor with high-density proof mass . Microsyst Technol , 22 ( 3 ): 459 - 464 . doi: 10.1007/s00542-015-2539-y http://doi.org/10.1007/s00542-015-2539-y

Zega V , Cred C , Bernasconi R , et al. , 2018 . The first 3-D-printed z -axis accelerometers with differential capacitive sensing . IEEE Sens J , 18 ( 1 ): 53 - 60 . doi: 10.1109/JSEN.2017.2768299 http://doi.org/10.1109/JSEN.2017.2768299

Zhang GJ , Tan QL , Lin BM , et al. , 2019 . A novel temperature and pressure measuring scheme based on LC sensor for ultra-high temperature environment . IEEE Access , 7 : 162747 - 162755 . doi: 10.1109/ACCESS.2019.2938834 http://doi.org/10.1109/ACCESS.2019.2938834

Zhang HC , Wei XY , Ding YY , et al. , 2019 . A low noise capacitive MEMS accelerometer with anti-spring structure . Sens Actuat A Phys , 296 : 79 - 86 . doi: 10.1016/j.sna.2019.06.051 http://doi.org/10.1016/j.sna.2019.06.051

Zhang HC , Wei XY , Gao Y , et al. , 2020 . Analytical study and thermal compensation for capacitive MEMS accelerometer with anti-spring structure . J Microelectromech Syst , 29 ( 5 ): 1389 - 1400 . doi: 10.1109/JMEMS.2020.3011949 http://doi.org/10.1109/JMEMS.2020.3011949

Zhang M , Xia LP , Dang SH , et al. , 2020 . Self-powered flexible pressure sensors based on nanopatterned polymer films . Sens Rev , 40 ( 6 ): 629 - 635 . doi: 10.1108/SR-01-2020-0010 http://doi.org/10.1108/SR-01-2020-0010

Zhao P , Zhou YF , 2020 . Active vibration control of flexible- joint manipulators using accelerometers . Ind Robot , 47 ( 1 ): 33 - 44 . doi: 10.1108/IR-07-2019-0144 http://doi.org/10.1108/IR-07-2019-0144

Zhong LJ , Yang J , Xu DL , et al. , 2020 . Bandwidth-enhanced oversampling successive approximation readout technique for low-noise power-efficient MEMS capacitive accelerometer . IEEE J Sol-State Circ , 55 ( 9 ): 2529 - 2538 . doi: 10.1109/JSSC.2020.3005811 http://doi.org/10.1109/JSSC.2020.3005811

Zhu BW , Ling YZ , Yap LW , et al. , 2019 . Hierarchically structured vertical gold nanowire array-based wearable pressure sensors for wireless health monitoring . ACS Appl Mater Interf , 11 ( 32 ): 29014 - 29021 . doi: 10.1021/acsami.9b0626 http://doi.org/10.1021/acsami.9b0626

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