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A digital moiré fringe method for displacement sensors
- 一种用于位移传感器的数字莫尔方法
- Frontiers of Information Technology & Electronic Engineering Vol. 17, Issue 9, Pages: 946-953(2016)
- Affiliations：
State Key Laboratory of Modern Optical Instrumentation, CNERC for Optical Instrument, Zhejiang University, Hangzhou, 310027, China
- Author bio：
E-mail:yuanbo@zju.edu.cn
- Funds：
DOI：10.1631/FITEE.1500270
CLC： TH741; TN911.7Received：19 August 2016，
Accepted：16 February 2016，
Published：2016-09
- Accepted：
Scan QR Code
Jian WU, Ting-ting ZHOU, Bo YUAN, et al. A digital moiré fringe method for displacement sensors[J]. Frontiers of Information Technology & Electronic Engineering, 2016, 17(9): 946-953.
Jian WU, Ting-ting ZHOU, Bo YUAN, et al. A digital moiré fringe method for displacement sensors[J]. Frontiers of Information Technology & Electronic Engineering, 2016, 17(9): 946-953. DOI： 10.1631/FITEE.1500270.
摘要
目的
2
在传统莫尔条纹技术的基础上，提出一种装调方便、分辨率可调节的位移测量技术。
创新点
2
仅使用一块光栅，利用图像处理技术生成数字莫尔条纹，从而既具有传统莫尔条纹技术的优点，又方便装调和系统分辨率设置。
方法
2
首先，利用面阵探测器接收光栅的放大像，并将图像信号送入计算机中。然后，将光栅像与其镜像像进行叠加产生数字莫尔条纹，并对条纹信号进行积分以得到数字莫尔曲线。最后，利用特殊设计算法估计条纹移动前后的相位差，并根据相位差计算位移量。本文根据所提出的方法构建了一套位移测量系统，对系统的稳定性、灵敏度和测量精度进行了测试。
结论
2
提出了一种基于数字莫尔条纹技术的位移测量方法，它既具有传统莫尔条纹技术的位移放大和误差平均的优点，又装调方便且可灵活调节分辨率。通过实验验证了该方法的可行性。
Abstract
In this study
a displacement measurement method based on digital moiré fringe is described and experimentally demonstrated. The method is formed by only one grating with a constant pitch. First
the magnified grating image is received by an imaging array and is sent to a computer. Then
the digital moiré fringes are generated by overlaying the grating image with its mirrored one. Finally
a specifically designed algorithm is used to obtain the fringes' phase difference before and after movement and calculate the displacement. This method has the effects of amplifying displacement and averaging the grating lines error
the same as the traditional moiré technique using two pieces of gratings. At the same time
the proposed system is much easier to assemble and the measurement resolution can be set more flexibly. One displacement measuring system based on this method was built up. Experiment results show that its measurement errors are less than 0.3 µm and less than 0.12 µm at the resolutions of 0.1 µm and 0.03 µm
respectively.
关键词
Keywords
references
XX Chen , , , CC Chang . . A digital sampling moiré method for two-dimensional displacement measurement . . SPIE , , 2015 . . 9435 943523 DOI: 10.1117/12.2084148 http://doi.org/10.1117/12.2084148 . .
F Cheng , , , KC Fan . . Linear diffraction grating interferometer with high alignment tolerance and high accuracy . . Appl. Opt. , , 2011 . . 50 ( ( 22 ): ): 4550 - - 4556 . . DOI: 10.1364/AO.50.004550 http://doi.org/10.1364/AO.50.004550 . .
XC Chu , , , HB Lü , , , SH Zhao . . Research on long-range grating interferometry with nanometer resolution . . Meas. Sci. Technol. , , 2008 . . 19 ( ( 1 ): ): 017001 DOI: 10.1088/0957-0233/19/1/017001 http://doi.org/10.1088/0957-0233/19/1/017001 . .
AJ Fleming . . A review of nanometer resolution position sensors: operation and performance . . Sens. Actuat. A , , 2013 . . 190 106 - - 126 . . DOI: 10.1016/j.sna.2012.10.016 http://doi.org/10.1016/j.sna.2012.10.016 . .
AA Khorshad , , , K Hassani , , , MT Tavassoly . . Nanometer displacement measurement using Fresnel diffraction . . Appl. Opt. , , 2012 . . 51 ( ( 21 ): ): 5066 - - 5072 . . DOI: 10.1364/AO.51.005066 http://doi.org/10.1364/AO.51.005066 . .
JY Lee , , , GA Jiang . . Displacement measurement using a wavelength-phase-shifting grating interferometer . . Opt. Expr. , , 2013 . . 21 ( ( 21 ): ): 25553 - - 25564 . . DOI: 10.1364/OE.21.025553 http://doi.org/10.1364/OE.21.025553 . .
NH Li , , , W Wu , , , SY Chou . . Sub-20-nm alignment in nanoimprint lithography using moiré fringe . . Nano Lett. , , 2006 . . 6 ( ( 11 ): ): 2626 - - 2629 . . DOI: 10.1021/nl0603395 http://doi.org/10.1021/nl0603395 . .
CM Liu , , , LW Chen , , , CC Wang . . Nanoscale displacement measurement by a digital nano-moiré method with wavelet transformation . . Nanotechnology , , 2006 . . 17 ( ( 17 ): ): 4359 - - 4366 . . DOI: 10.1088/0957-4484/17/17/012 http://doi.org/10.1088/0957-4484/17/17/012 . .
T Oka , , , Y Ohmura , , , H Nakajima , , , 等 . . Displacement sensor based on grating imaging with a cylindrical lens array and a phase grating . . Opt. Eng. , , 2007 . . 46 ( ( 7 ): ): 073603 DOI: 10.1117/1.2753185 http://doi.org/10.1117/1.2753185 . .
PM Ramos , , , AC Serra . . A new sine-fitting algorithm for accurate amplitude and phase measurements in two channel acquisition systems . . Measurement , , 2008 . . 41 ( ( 2 ): ): 135 - - 143 . . DOI: 10.1016/j.measurement.2006.03.011 http://doi.org/10.1016/j.measurement.2006.03.011 . .
J Shao , , , H Liu , , , Y Ding , , , 等 . . Alignment measurement method for imprint lithography using moiré fringe pattern . . Opt. Eng. , , 2008 . . 47 ( ( 11 ): ): 113604 DOI: 10.1117/1.3028350 http://doi.org/10.1117/1.3028350 . .
J Shao , , , Y Ding , , , H Tian , , , 等 . . Digital moiré fringe measurement method for alignment in imprint lithography . . Opt. Laser Technol. , , 2012 . . 44 ( ( 2 ): ): 446 - - 451 . . DOI: 10.1016/j.optlastec.2011.08.010 http://doi.org/10.1016/j.optlastec.2011.08.010 . .
N Suehira , , , A Terasaki , , , S Okushima , , , 等 . . Position measurement method for alignment in UV imprint using a high index mold and "electronic" moiré technique . . J. Vac. Sci. Technol. B , , 2007 . . 25 ( ( 3 ): ): 853 - - 856 . . DOI: 10.1116/1.2737440 http://doi.org/10.1116/1.2737440 . .
NM Vucijak , , , LV Saranovac . . A simple algorithm for the estimation of phase difference between two sinusoidal voltages . . IEEE Trans. Instr. Meas. , , 2010 . . 59 ( ( 12 ): ): 3152 - - 3158 . . DOI: 10.1109/TIM.2010.2047155 http://doi.org/10.1109/TIM.2010.2047155 . .
H Wang , , , J Wang , , , B Chen , , , 等 . . Absolute optical imaging position encoder . . Measurement , , 2015 . . 67 42 - - 50 . . DOI: 10.1016/j.measurement.2015.02.028 http://doi.org/10.1016/j.measurement.2015.02.028 . .
D Wu , , , H Xie , , , C Li , , , 等 . . Application of the digital phase-shifting method in 3D deformation measurement at micro-scale by SEM . . Meas. Sci. Technol. , , 2014 . . 25 125002 DOI: 10.1088/0957-0233/25/12/125002 http://doi.org/10.1088/0957-0233/25/12/125002 . .
B Yuan , , , HM Yan , , , XQ Cao . . A new subdivision method for grating-based displacement sensor using imaging array . . Opt. Lasers Eng. , , 2009 . . 47 ( ( 1 ): ): 90 - - 95 . . DOI: 10.1016/j.optlaseng.2008.07.013 http://doi.org/10.1016/j.optlaseng.2008.07.013 . .
S Zhao , , , C Hou , , , J Bai , , , 等 . . Nanometer-scale displacement sensor based on phase-sensitive diffraction grating . . Appl. Opt. , , 2011 . . 50 ( ( 10 ): ): 1413 - - 1416 . . DOI: 10.1364/AO.50.001413 http://doi.org/10.1364/AO.50.001413 . .
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