Micro-angle tilt detection for the rotor of a novel rotational gyroscope with a 0.47″ resolution

Hai LI; Xiao-wei LIU; Rui WENG; Hai-feng ZHANG

doi:10.1631/FITEE.1500454

Your Location：

Home >

Browse articles >

Micro-angle tilt detection for the rotor of a novel rotational gyroscope with a 0.47″ resolution

Regular Papers | Updated：2022-05-19

- Micro-angle tilt detection for the rotor of a novel rotational gyroscope with a 0.47″ resolution
- 一种新型转子式陀螺的分辨率为0.47′′ 的转子微偏转角度检测方法
- Frontiers of Information Technology & Electronic Engineering Vol. 18, Issue 5, Pages: 591-598(2017)
- Affiliations：
  
  1MEMS Center, Harbin Institute of Technology, Harbin 150001, China
  2MOE Key Laboratory of Micro-Systems and Micro-Structures Manufacturing, Harbin 150001, China
- Author bio：
  
  E-mail:zhanghf@hit.edu.cn
- Funds：
- DOI：10.1631/FITEE.1500454
  CLC： TP212.1
- Received：11 December 2015，
  
  Accepted：20 March 2016，
  
  Published：2017-05
- Accepted：
Scan QR Code
Hai LI, Xiao-wei LIU, Rui WENG, et al. Micro-angle tilt detection for the rotor of a novel rotational gyroscope with a 0.47″ resolution[J]. Frontiers of Information Technology & Electronic Engineering, 2017, 18(5): 591-598.
DOI：

Hai LI, Xiao-wei LIU, Rui WENG, et al. Micro-angle tilt detection for the rotor of a novel rotational gyroscope with a 0.47″ resolution[J]. Frontiers of Information Technology & Electronic Engineering, 2017, 18(5): 591-598. DOI： 10.1631/FITEE.1500454.

摘要

差分电容检测被广泛应用于振动陀螺仪质量块的位移测量，然而由于结构、理论以及接口电路等因素的限制其在转子式陀螺所需的转子偏转角度检测方面还尚未取得较高分辨率。本文提出了一种差分电容检测结构，用以测量一种新型转子式陀螺转子的偏转角度。本文建立了结构电容与转子偏转角度之间关系的数学模型，分析了差分电容与结构参数之间的关系，并获得了初步优化的尺寸参数。设计了一款低噪声读出接口电路将差分电容的变化转换为电压信号。对陀螺仪的转台测试结果表明，该角度检测结构的最小可分辨的偏转角度小于0.47′′ (0.00013°)，三次多项式补偿后检测结构的非线性可达0.33%，并可进一步提高。结果表明该检测结构和电路有助于实现该陀螺仪的高精度。

Abstract

Differential capacitive detection has been widely used in the displacement measurement of the proof mass of vibratory gyroscopes

but it did not achieve high resolutions in angle detection of rotational gyroscopes due to restrictions in structure

theory

and interface circuitry. In this paper

a differential capacitive detection structure is presented to measure the tilt angle of the rotor of a novel rotational gyroscope. A mathematical model is built to study how the structure's capacitance changes with the rotor tilt angles. The relationship between differential capacitance and structural parameters is analyzed

and preliminarily optimized size parameters are adopted. A lownoise readout interface circuit is designed to convert differential capacitance changes to voltage signals. Rate table test results of the gyroscope show that the smallest resolvable tilt angle of the rotor is less than 0.47″ (0.00013°)

and the nonlinearity of the angle detection structure is 0.33%

which can be further improved. The results indicate that the proposed detection structure and the circuitry are helpful for a high accuracy of the gyroscope.

关键词

Keywords

references

L Aaltonen , , , KAI Halonen . . An analog drive loop for a capacitive MEMS gyroscope . . Anal. Integr. Circ. Sig. Process. , , 2010 . . 63 ( ( 3 ): ): 465 - - 476 . . DOI: 10.1007/s10470-009-9395-6 http://doi.org/10.1007/s10470-009-9395-6 . .

SE Alper , , , Y Temiz , , , T Akin . . A compact angular rate sensor system using a fully decoupled silicon-onglass MEMS gyroscope . . J. Microelectromech. Syst. , , 2008 . . 17 ( ( 6 ): ): 1418 - - 1429 . . DOI: 10.1109/JMEMS.2008.2007274 http://doi.org/10.1109/JMEMS.2008.2007274 . .

AD Challoner , , , HH Ge , , , JY Liu . . Boeing disc resonator gyroscope . . 2014 . . IEEE/ION Position, Location and Navigation Symp. . . 504 - - 514 . . DOI: 10.1109/PLANS.2014.6851410 http://doi.org/10.1109/PLANS.2014.6851410 . .

F Cui , , , W Chen , , , Y Su , , , 等 . . Design of electrostatically levitated micromachined rotational gyroscope based on UV-LIGA technology . . SPIE , , 2004 . . 5641 264 - - 275 . . DOI: 10.1117/12.575632 http://doi.org/10.1117/12.575632 . .

B Damrongsak , , , M Kraft . . Design and simulation of a micromachined electrostatically suspended gyroscope . . 2006 . . IET Seminar on MEMS Sensors and Actuators . . 267 - - 272 . . DOI: 10.1049/ic:20060468 http://doi.org/10.1049/ic:20060468 . .

R Fang , , , W Lu , , , T Tao , , , 等 . . A control and readout circuit with capacitive mismatch auto-compensation for MEMS vibratory gyroscope . . 2012 . . IEEE 11th Int. Conf. on Solid-State and Integrated Circuit Technology . . 1 - - 3 . . DOI: 10.1109/ICSICT.2012.6467587 http://doi.org/10.1109/ICSICT.2012.6467587 . .

L Feng , , , Z Zhang , , , Y Sun , , , 等 . . Differential pickup circuit design of a kind of Z-axis MEMS quartz gyroscope . . Proc. Eng. , , 2011 . . 15 999 - - 1003 . . DOI: 10.1016/j.proeng.2011.08.185 http://doi.org/10.1016/j.proeng.2011.08.185 . .

MV Gindila , , , M Kraft . . Electronic interface design for an electrically floating micro-disc . . J. Micromech. Microeng. , , 2003 . . 13 ( ( 4 ): ): S11 - - S16 . . DOI: 10.1088/0960-1317/13/4/302 http://doi.org/10.1088/0960-1317/13/4/302 . .

K Hays , , , R Schmidt , , , W Wilson , , , 等 . . A submarine navigator for the 21st century . . 2002 . . IEEE Position Location and Navigation Symp. . . 179 - - 188 . . DOI: 10.1109/PLANS.2002.998906 http://doi.org/10.1109/PLANS.2002.998906 . .

R Houlihan , , , M Kraft . . Modelling of an accelerometer based on a levitated proof mass . . J. Micromech. Microeng. , , 2002 . . 12 ( ( 4 ): ): 495 DOI: 10.1088/0960-1317/12/4/325 http://doi.org/10.1088/0960-1317/12/4/325 . .

XG Huang , , , WY Chen , , , W Liu , , , 等 . . High resolution differential capacitance detection scheme for micro levitated rotor gyroscope . . Chin. J. Aeronaut. , , 2007 . . 20 ( ( 6 ): ): 546 - - 551 . . DOI: 10.1016/S1000-9361(07)60080-6 http://doi.org/10.1016/S1000-9361(07)60080-6 . .

QM Lam , , , N Stamatakos , , , C Woodruff , , , 等 . . Gyro modeling and estimation of its random noise sources . . 2003 . . AIAA Guidance, Navigation, and Control Conf. and Exhibit . . 1 - - 11 . . DOI: 10.2514/6.2003-5562 http://doi.org/10.2514/6.2003-5562 . .

H Li , , , X Liu , , , B Wang , , , 等 . . Impact of assembly on signal detection from thin-wall rotors of micro-gyroscopes . . AIP Adv. , , 2014 . . 4 ( ( 3 ): ): 031341 DOI: 10.1063/1.4869618 http://doi.org/10.1063/1.4869618 . .

J Liu , , , Q Shen , , , W Qin . . Signal processing technique for combining numerous MEMS gyroscopes based on dynamic conditional correlation . . Micromachines , , 2015 . . 6 ( ( 6 ): ): 684 - - 698 . . DOI: 10.3390/mi6060684 http://doi.org/10.3390/mi6060684 . .

K Liu , , , WP Zhang , , , WY Chen , , , 等 . . The development of micro-gyroscope technology . . J. Micromech. Microeng. , , 2009 . . 19 ( ( 11 ): ): 113001 DOI: 10.1088/0960-1317/19/11/113001 http://doi.org/10.1088/0960-1317/19/11/113001 . .

W Liu , , , WY Chen , , , WP Zhang , , , 等 . . Variablecapacitance micromotor with levitated diamagnetic rotor . . Electron. Lett. , , 2008 . . 44 ( ( 11 ): ): 681 - - 683 . . DOI: 10.1049/el:20080528 http://doi.org/10.1049/el:20080528 . .

T Murakoshi , , , Y Endo , , , K Fukatsu , , , 等 . . Electrostatically levitated ring-shaped rotationalgyro/accelerometer . . Jpn. J. Appl. Phys. , , 2003 . . 42 ( ( 4S ): ): 2468 - - 2472 . . DOI: 10.1143/JJAP.42.2468 http://doi.org/10.1143/JJAP.42.2468 . .

T Northemann , , , M Maurer , , , S Rombach , , , 等 . . A digital interface for gyroscopes controlling the primary and secondary mode using bandpass sigma-delta modulation . . Sens. Actuat. A , , 2010 . . 162 ( ( 2 ): ): 388 - - 393 . . DOI: 10.1016/j.sna.2010.05.034 http://doi.org/10.1016/j.sna.2010.05.034 . .

C Shearwood , , , KY Ho , , , CB Williams , , , 等 . . Development of a levitated micromotor for application as a gyroscope . . Sens. Actuat. A , , 2000 . . 83 ( ( 1-3 ): ): 85 - - 92 . . DOI: 10.1016/S0924-4247(00)00292-2 http://doi.org/10.1016/S0924-4247(00)00292-2 . .

WT Sung , , , S Sung , , , JY Lee , , , 等 . . Development of a lateral velocity-controlled MEMS vibratory gyroscope and its performance test . . J. Micromech. Microeng. , , 2008 . . 18 ( ( 5 ): ): 055028 DOI: 10.1088/0960-1317/18/5/055028 http://doi.org/10.1088/0960-1317/18/5/055028 . .

NC Tsai , , , WM Huang , , , CW Chiang . . Magnetic actuator design for single-axis micro-gyroscopes . . Microsyst. Technol. , , 2009 . . 15 ( ( 4 ): ): 493 - - 503 . . DOI: 10.1007/s00542-008-0769-y http://doi.org/10.1007/s00542-008-0769-y . .

D Xia , , , C Yu , , , L Kong . . The development of micromachined gyroscope structure and circuitry technology . . Sensors , , 2014 . . 14 ( ( 1 ): ): 1394 - - 1473 . . DOI: 10.3390/s140101394 http://doi.org/10.3390/s140101394 . .

D Xia , , , L Kong , , , H Gao . . Design and analysis of a novel fully decoupled tri-axis linear vibratory gyroscope with matched modes . . Sensors , , 2015 . . 15 ( ( 7 ): ): 16929 - - 16955 . . DOI: 10.3390/s150716929 http://doi.org/10.3390/s150716929 . .

H Xu , , , X Liu , , , L Yin . . A closed-loop interface for a high-Q micromechanical capacitive accelerometer with 200 ng/√Hz input noise density . . IEEE J. SolidState Circ. , , 2015 . . 50 ( ( 9 ): ): 2101 - - 2112 . . DOI: 10.1109/JSSC.2015.2428278 http://doi.org/10.1109/JSSC.2015.2428278 . .

L Xue , , , C Jiang , , , L Wang , , , 等 . . Noise reduction of MEMS gyroscope based on direct modeling for an angular rate signal . . Micromachines , , 2015 . . 6 ( ( 2 ): ): 266 - - 280 . . DOI: 10.3390/mi6020266 http://doi.org/10.3390/mi6020266 . .

Views

Downloads

CSCD

Alert me when the article has been cited

Submit

Tools

Publicity Resources

No data

Related Author

No data

Related Institution

No data

Chat

Address：Zhejiang University Press, 148 Tianmushan Road, Hangzhou, China Postal code：310028
Tel：+86-571-88273162 Email：fitee@zju.edu.cn
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰