Heterogeneous Ⅲ-Ⅴ silicon photonic integration: components and characterization

Shang-jian ZHANG; Yong LIU; Rong-guo LU; Bao SUN; Lian-shan YAN

doi:10.1631/FITEE.1800482

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Heterogeneous Ⅲ-Ⅴ silicon photonic integration: components and characterization

Special Feature on Optoelectronic Devices and Integration | Updated：2022-05-19

- Heterogeneous Ⅲ-Ⅴ silicon photonic integration: components and characterization
- III-V/Si异质光子集成：组件及其特性
- Frontiers of Information Technology & Electronic Engineering Vol. 20, Issue 4, Pages: 472-480(2019)
- Affiliations：
  
  School of Optoelectronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, China
  Center for Information Photonics and Communications, School of Information Science and Technology, Southwest Jiaotong University, Chengdu 610031, China
- Author bio：
  
  Shang-jian ZHANG, E-mail: sjzhang@uestc.edu.cn
  [ "Yong LIU, E-mail: yongliu@uestc.edu.cn" ]
- Funds：
- DOI：10.1631/FITEE.1800482
  CLC： O439
- Received：11 August 2018，
  
  Revised：2019-;4-11，
  
  Published：2019-04
- Accepted：
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Shang-jian ZHANG, Yong LIU, Rong-guo LU, et al. Heterogeneous Ⅲ-Ⅴ silicon photonic integration: components and characterization[J]. Frontiers of Information Technology & Electronic Engineering, 2019, 20(4): 472-480.
DOI：

Shang-jian ZHANG, Yong LIU, Rong-guo LU, et al. Heterogeneous Ⅲ-Ⅴ silicon photonic integration: components and characterization[J]. Frontiers of Information Technology & Electronic Engineering, 2019, 20(4): 472-480. DOI： 10.1631/FITEE.1800482.

摘要

III-V/Si异质光子集成被视为实现能源效率和成本效率的光互连关键技术之一，在未来高性能计算机和数据中心有极大潜力。本文综述了包括收发器件和组件的III-V/Si异质光子集成的最新研究进展，并报告了在光子集成回路，特别是异质集成平台上实现光子集成回路的晶圆级测试分析进展。

Abstract

Heterogeneous Ⅲ-Ⅴ silicon (Si) photonic integration is considered one of the key methods for realizing power-and cost-effective optical interconnections

which are highly desired for future high-performance computers and datacenters. We review the recent progress in heterogeneous Ⅲ-Ⅴ/Si photonic integration

including transceiving devices and components. We also describe the progress in the on-wafer characterization of photonic integration circuits

especially on the heterogeneous Ⅲ-Ⅴ/Si platform.

关键词

Keywords

references

Y Arakawa , , , T Nakamura , , , Y Urino , , , 等 . . Silicon photonics for next generation system integration platform . . IEEE Commun Mag , , 2013 . . 51 ( ( 3 ): ): 72 - - 77 . . DOI: 10.1109/MCOM.2013.6476868 http://doi.org/10.1109/MCOM.2013.6476868 . .

A Beling , , , AS Cross , , , M Piels , , , 等 . . InP-based waveguide photodiodes heterogeneously integrated on silicon-on-insulator for photonic microwave generation . . Opt Expr , , 2013 . . 21 ( ( 22 ): ): 25901 - - 25906 . . DOI: 10.1364/OE.21.025901 http://doi.org/10.1364/OE.21.025901 . .

V Cristofori , , , Ros F da , , , O Ozolins , , , 等 . . 25-Gb/s transmission over 2.5-km SSMF by silicon MRR enhanced 1.55-μm Ⅲ-Ⅴ/SOI DML . . IEEE Photon Technol Lett , , 2017 . . 29 ( ( 12 ): ): 960 - - 963 . . DOI: 10.1109/LPT.2017.2700497 http://doi.org/10.1109/LPT.2017.2700497 . .

S Dhoore , , , LY Li , , , A Abbasi , , , 等 . . Demonstration of a discretely tunable Ⅲ-Ⅴ-on-silicon sampled grating DFB laser . . IEEE Photon Technol Lett , , 2016 . . 28 ( ( 21 ): ): 2343 - - 2346 . . DOI: 10.1109/LPT.2016.2593983 http://doi.org/10.1109/LPT.2016.2593983 . .

C Doerr . . Silicon photonic integration in telecommunications . . Front Phys , , 2015 . . 3 ( ( 2 ): ): 137 - - 179 . . DOI: 10.3389/fphy.2015.00037 http://doi.org/10.3389/fphy.2015.00037 . .

J Durel , , , BB Bakir , , , C Jany , , , 等 . . First demonstration of a back-side integrated heterogeneous hybrid Ⅲ-Ⅴ/Si DBR lasers for Si-photonics applications . . IEEE Int Electron Devices Meeting , , 2016a . . p.584 - - 587 . . DOI: 10.1109/IEDM.2016.7838471 http://doi.org/10.1109/IEDM.2016.7838471 . .

J Durel , , , T Ferrotti , , , A Chantre , , , 等 . . Realization of back-side heterogeneous hybrid Ⅲ-Ⅴ/Si DBR lasers for silicon photonics . . Proc SPIE , , 2016b . . p.1 - - 12 . . DOI: 10.1117/12.2212309 http://doi.org/10.1117/12.2212309 . .

A Gallet , , , G Levaufre , , , A Accard , , , 等 . . Hybrid Ⅲ-Ⅴ on silicon integrated distributed feedback laser and ring resonator for 25 Gb/s future access networks . . J Lightw Technol , , 2018 . . 36 ( ( 8 ): ): 1498 - - 1502 . . DOI: 10.1109/JLT.2017.2782012 http://doi.org/10.1109/JLT.2017.2782012 . .

H Guan , , , A Novack , , , T Galfsky , , , 等 . . Widely-tunable, narrow-linewidth Ⅲ-Ⅴ/silicon hybrid external-cavity laser for coherent communication . . Opt Expr , , 2018 . . 26 ( ( 7 ): ): 7920 - - 7933 . . DOI: 10.1364/OE.26.007920 http://doi.org/10.1364/OE.26.007920 . .

JC Hulme , , , JK Doylend , , , JE Bowers . . Widely tunable vernier ring laser on heterogeneous silicon . . Opt Expr , , 2013 . . 21 ( ( 17 ): ): 19718 - - 19722 . . DOI: 10.1364/OE.21.019718 http://doi.org/10.1364/OE.21.019718 . .

D Inoue , , , D Jung , , , J Norman , , , 等 . . Directly modulated 1.3 μm quantum dot lasers epitaxially grown on silicon . . Opt Expr , , 2018 . . 26 ( ( 6 ): ): 7022 - - 7033 . . DOI: 10.1364/OE.26.007022 http://doi.org/10.1364/OE.26.007022 . .

T Komljenovic , , , M Davenport , , , S Srinivasan , , , 等 . . Narrow linewidth tunable laser using coupled resonator mirrors . . Optical Fiber Communications Conf , , 2015a . . p.1 - - 3 . . DOI: 10.1364/OFC.2015.W2A.52 http://doi.org/10.1364/OFC.2015.W2A.52 . .

T Komljenovic , , , S Srinivasan , , , E Norberg , , , 等 . . Widely tunable narrow-linewidth monolithically integrated external-cavity semiconductor lasers . . IEEE J Sel Top Quant Electr , , 2015b . . 21 ( ( 6 ): ): 1501909 DOI: 10.1109/JSTQE.2015.2422752 http://doi.org/10.1109/JSTQE.2015.2422752 . .

G Kurian , , , JE Miller , , , J Psota , , , 等 . . ATAC: a 1000-core cache-coherent processor with on-chip optical network . . 19 th Int Conf on Parallel Architectures and Compilation Techniques , , 2010 . . p.477 - - 488 . . DOI: 10.1145/1854273.1854332 http://doi.org/10.1145/1854273.1854332 . .

S Le Beux , , , H Li , , , I O'Connor , , , 等 . . Chameleon: channel efficient optical network-on-chip . . Proc Design, Automation & Test in Europe Conf & Exhibition , , 2014 . . p.1 - - 6 . . DOI: 10.7873/DATE.2014.317 http://doi.org/10.7873/DATE.2014.317 . .

CW Lee , , , DKT Ng , , , M Ren , , , 等 . . Generic heterogeneously integrated Ⅲ-Ⅴ lasers-on-chip with metal-coated etched-mirror . . IEEE J Sel Top Quant Electr , , 2016 . . 22 ( ( 6 ): ): 1500409 DOI: 10.1109/JSTQE.2016.2549800 http://doi.org/10.1109/JSTQE.2016.2549800 . .

AY Liu , , , C Zhang , , , J Norman , , , 等 . . High performance continuous wave 1.3 μm quantum dot lasers on silicon . . Appl Phys Lett , , 2014 . . 104 ( ( 4 ): ): 041104 DOI: 10.1063/1.4863223 http://doi.org/10.1063/1.4863223 . .

Y Pan , , , P Kumar , , , J Kim , , , 等 . . Firefly: illuminating future network-on-chip with nanophotonics . . Int Symp on Computer Architecture , , 2009 . . p.429 - - 440 . . DOI: 10.1145/1555754.1555808 http://doi.org/10.1145/1555754.1555808 . .

M Piels , , , JF Bauters , , , ML Davenport , , , 等 . . Low-loss silicon nitride AWG demultiplexer heterogeneously integrated with hybrid Ⅲ-Ⅴ/silicon photodetectors . . J Lightw Technol , , 2014 . . 32 ( ( 4 ): ): 817 - - 823 . . . .

S Srinivasan , , , M Davenport , , , T Komljenovic , , , 等 . . Coupled-ring-resonator-mirror-based heterogeneous Ⅲ-Ⅴ silicon tunable laser . . IEEE Photon J , , 2015 . . 7 ( ( 3 ): ): 2700908 DOI: 10.1109/JPHOT.2015.2428255 http://doi.org/10.1109/JPHOT.2015.2428255 . .

C Sun , , , MT Wade , , , Y Lee , , , 等 . . Single-chip microprocessor that communicates directly using light . . Nature , , 2015 . . 528 ( ( 7583 ): ): 534 - - 538 . . DOI: 10.1038/nature16454 http://doi.org/10.1038/nature16454 . .

J Sun , , , E Timurdogan , , , A Yaacobi , , , 等 . . Large-scale nanophotonic phased array . . Nature , , 2013 . . 493 ( ( 7431 ): ): 195 - - 199 . . DOI: 10.1038/nature11727 http://doi.org/10.1038/nature11727 . .

KY Sun , , , D Jung , , , C Shang , , , 等 . . Low dark current Ⅲ-Ⅴ on silicon photodiodes by heteroepitaxy . . Opt Expr , , 2018 . . 26 ( ( 10 ): ): 13605 - - 13613 . . DOI: 10.1364/OE.26.013605 http://doi.org/10.1364/OE.26.013605 . .

S Uvin , , , S Kumari , , , A de Groote , , , 等 . . 1.3 μm InAs/ GaAs quantum dot DFB laser integrated on a Si waveguide circuit by means of adhesive die-to-wafer bonding . . Opt Expr , , 2018 . . 26 ( ( 14 ): ): 18302 - - 18309 . . DOI: 10.1364/OE.26.018302 http://doi.org/10.1364/OE.26.018302 . .

D Vantrease , , , R Schreiber , , , M Monchiero , , , 等 . . Corona: system implications of emerging nanophotonic technology . . 35 th Int Symp on Computer Architecture , , 2008 . . p.153 - - 164 . . DOI: 10.1109/ISCA.2008.35 http://doi.org/10.1109/ISCA.2008.35 . .

YY Ye , , , J Xu , , , BH Huang , , , 等 . . 3-D mesh-based optical network-on-chip for multiprocessor system-on-chip . . IEEE Trans Comput Aid Des Int , , 2013 . . 32 ( ( 4 ): ): 584 - - 596 . . DOI: 10.1109/TCAD.2012.2228739 http://doi.org/10.1109/TCAD.2012.2228739 . .

C Zhang , , , SJ Zhang , , , JD Peters , , , 等 . . 2.56 Tbps (8×8× 40 Gbps) fully-integrated silicon photonic interconnection circuit . . Conf on Lasers and Electro-Optics , , 2016 . . p.1 - - 2 . . DOI: 10.1364/CLEO_AT.2016.JTh4C.4 http://doi.org/10.1364/CLEO_AT.2016.JTh4C.4 . .

J Zhang , , , B Haq , , , J O'Callaghan , , , 等 . . Transfer-printing-based integration of a Ⅲ-Ⅴ-on-silicon distributed feedback laser . . Opt Expr , , 2018 . . 26 ( ( 7 ): ): 8821 - - 8830 . . DOI: 10.1364/OE.26.008821 http://doi.org/10.1364/OE.26.008821 . .

SJ Zhang , , , C Zhang , , , H Wang , , , 等 . . On-wafer probing-kit for RF characterization of silicon photonic integrated transceivers . . Opt Expr , , 2017 . . 25 ( ( 12 ): ): 13340 - - 13350 . . DOI: 10.1364/oe.25.013340 http://doi.org/10.1364/oe.25.013340 . .

S Zhu , , , B Shi , , , Q Li , , , 等 . . Room-temperature electrically-pumped 1.5μm InGaAs/InAlGaAs laser monolithically grown on on-axis (001) Si . . Opt Expr , , 2018 . . 26 ( ( 11 ): ): 14514 - - 14523 . . DOI: 10.1364/OE.26.014514 http://doi.org/10.1364/OE.26.014514 . .

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