Electronically enhancing the long-range nanopositioning accuracy of a Lorentz force actuator

Bimal Jeet GOTEEA; Qianjun ZHANG; Wei DONG

doi:10.1631/FITEE.2200255

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Electronically enhancing the long-range nanopositioning accuracy of a Lorentz force actuator

Regular Papers | Updated：2023-07-24

- Electronically enhancing the long-range nanopositioning accuracy of a Lorentz force actuator
- 以电子方式提升洛伦兹力驱动器的大行程纳米定位精度
- Frontiers of Information Technology & Electronic Engineering Vol. 24, Issue 7, Pages: 1080-1092(2023)
- Affiliations：
  
  State Key Laboratory of Robotics and System, Harbin Institute of Technology, Harbin 150001, China
- Author bio：
  
  E-mail: bj.goteea@gmail.com
  zhang_qj@stu.hit.edu.cn
  ‡Corresponding author
- Funds：
- DOI：10.1631/FITEE.2200255
  CLC： TM36; TN710
- Received：12 June 2022，
  
  Revised：2022-09-16，
  
  Published：0 July 2023
- Accepted：
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Bimal Jeet GOTEEA, Qianjun ZHANG, Wei DONG. Electronically enhancing the long-range nanopositioning accuracy of a Lorentz force actuator[J]. Frontiers of Information Technology & Electronic Engineering, 2023, 24(7): 1080-1092.
DOI：

Bimal Jeet GOTEEA, Qianjun ZHANG, Wei DONG. Electronically enhancing the long-range nanopositioning accuracy of a Lorentz force actuator[J]. Frontiers of Information Technology & Electronic Engineering, 2023, 24(7): 1080-1092. DOI： 10.1631/FITEE.2200255.

摘要

本文展现了一种基于洛伦兹力驱动器和柔顺导向的精密厘米级定位器。通过使用一个额外的数模转换器（DAC）和运算放大器（op amp）电路，以及合适的控制器将定位精度提高到纳米级。首先，基于柔顺导向模型的刚度为驱动器设计了恰当的线圈。然后通过有限元分析（FEA）验证了柔顺机构和驱动器的性能。基于此，提出一种通过电子方式提升定位性能的方法及控制方案。最后，构建了原理样机并对其性能进行评估。该定位器的特色在于其在10 mm行程内实现10 nm分辨率。所提出的方案可以拓展适用于其他同类型系统。

Abstract

This paper presents a precision centimeter-range positioner based on a Lorentz force actuator using flexure guides. An additional digital-to-analog converter and an operational amplifier (op amp) circuit together with a suitable controller are used to enhance the positioning accuracy to the nanometer level. First

a suitable coil is designed for the actuator based on the stiffness of the flexure guide model. The flexure mechanism and actuator performance are then verified with finite element analysis. Based on these

a means to enhance the positioning performance electronically is presented together with the control scheme. Finally

a prototype is fabricated

and the performance is evaluated. This positioner features a range of 10 mm with a resolution of 10 nm. The proposed scheme can be extended to other systems.

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references

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