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Erratum to: A sparse matrix model-based optical proximity correction algorithm with model-based mapping between segments and control sites
Electronic Engineering | Updated:2022-08-31
    • Erratum to: A sparse matrix model-based optical proximity correction algorithm with model-based mapping between segments and control sites

    • Erratum to: A sparse matrix model-based optical proximity correction algorithm with model-based mapping between segments and control sites
    • Frontiers of Information Technology & Electronic Engineering   Vol. 12, Issue 7, Pages: 614(2011)
    • DOI:10.1631/jzus.C10e0219    

      CLC:
    • Published:2011-07

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  • Bin LIN, Xiao-lang YAN, Zheng SHI, et al. Erratum to: A sparse matrix model-based optical proximity correction algorithm with model-based mapping between segments and control sites[J]. Frontiers of Information Technology & Electronic Engineering, 2011, 12(7): 614. DOI: 10.1631/jzus.C10e0219.

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