Microfabrication technology for non-coplanar resonant beams and crab-leg supporting beams of dual-axis bulk micromachined resonant accelerometers

Jian-qiang HAN; Ri-sheng FENG; Yan LI; Sen-lin LI; Qing LI

doi:10.1631/jzus.C1200251

Your Location：

Home >

Browse articles >

Microfabrication technology for non-coplanar resonant beams and crab-leg supporting beams of dual-axis bulk micromachined resonant accelerometers

Electrical & Electronic Engineering | Updated：2022-12-09

- Microfabrication technology for non-coplanar resonant beams and crab-leg supporting beams of dual-axis bulk micromachined resonant accelerometers
- Microfabrication technology for non-coplanar resonant beams and crab-leg supporting beams of dual-axis bulk micromachined resonant accelerometers
- Frontiers of Information Technology & Electronic Engineering Vol. 14, Issue 1, Pages: 65-74(2013)
- Affiliations：
  
  College of Mechanical & Electrical Engineering, China Jiliang University, Hangzhou 310018, China
- Author bio：
  
  Jian-qiang HAN, E-mail: hjqsmx@sina.com
- Funds：
- DOI：10.1631/jzus.C1200251
  CLC： TP212
- Received：24 August 2012，
  
  Revised：2012-12-14，
  
  Published：2013-01
- Accepted：
Scan QR Code
Jian-qiang HAN, Ri-sheng FENG, Yan LI, et al. Microfabrication technology for non-coplanar resonant beams and crab-leg supporting beams of dual-axis bulk micromachined resonant accelerometers[J]. Frontiers of Information Technology & Electronic Engineering, 2013, 14(1): 65-74.
DOI：

Jian-qiang HAN, Ri-sheng FENG, Yan LI, et al. Microfabrication technology for non-coplanar resonant beams and crab-leg supporting beams of dual-axis bulk micromachined resonant accelerometers[J]. Frontiers of Information Technology & Electronic Engineering, 2013, 14(1): 65-74. DOI： 10.1631/jzus.C1200251.

摘要

Abstract

This paper presents the design principles and fabrication techniques for simultaneously forming non-coplanar resonant beams and crab-leg supporting beams of dual-axis bulk micromachined resonant accelerometers by masked-maskless combined anisotropic etching. Four resonant beams are located at the surface of a silicon substrate

whereas the gravity centre of a proof mass lies within the neutral plane of four crab-leg supporting beams on the same substrate. Compared with early reported mechanical structures

the simple structure not only eliminates the bending moments caused by in-plane acceleration

and thereby avoiding the rotation of the proof mass

but also providing sufficiently small rigidity to

and

axes accelerations

potentially leading to a large sensitivity for measuring the in-plane acceleration.

关键词

Keywords

references

M. Bao , , , C. Burrer , , , J. Esteve , , , J. Bausells , , , S. Marco . . Etching front control of <110> strips for corner compensation . . Sens. Actuat. A , , 1993 . . 37-38 727 - - 732 . . DOI: 10.1016/0924-4247(93)80123-X http://doi.org/10.1016/0924-4247(93)80123-X . .

D.W. Burns , , , R.D. Horning , , , W.R. Herb , , , J.D. Zook , , , H. Guckel . . Sealed-cavity resonant microbeam accelerometer . . Sens. Actuat. A , , 1996 . . 53 ( ( 1-3 ): ): 249 - - 255 . . DOI: 10.1016/0924-4247(96)01135-1 http://doi.org/10.1016/0924-4247(96)01135-1 . .

C. Burrer , , , J. Esteve , , , E. Lora-Tamayo . . Resonant silicon accelerometers in bulk micromachining technology—an approach . . J. Microelectromech. Syst. , , 1996 . . 5 ( ( 2 ): ): 122 - - 130 . . DOI: 10.1109/84.506200 http://doi.org/10.1109/84.506200 . .

D. Chen , , , Z. Wu , , , L. Liu , , , X. Shi , , , J. Wang . . An electromagnetically excited silicon nitride beam resonant accelerometer . . Sensors , , 2009 . . 9 ( ( 3 ): ): 1330 - - 1338 . . DOI: 10.3390/s90301330 http://doi.org/10.3390/s90301330 . .

C. Comi , , , A. Corigliano , , , G. Langfelder , , , A. Longoni , , , A. Tocchio , , , B. Simoni . . A New Two-Beam Differential Resonant Micro Accelerometer . . IEEE Conf. on Sensors , , 2009 . . p.158 - - 163 . . DOI: 10.1109/ICSENS.2009.5398209 http://doi.org/10.1109/ICSENS.2009.5398209 . .

C. Comi , , , A. Corigliano , , , G. Langfelder , , , A. Longoni , , , A. Tocchio , , , B. Simoni . . A High Sensitivity Uniaxial Resonant Accelerometer . . IEEE 23rd Int. Conf. on Micro Electro Mechanical Systems , , 2010 . . p.260 - - 263 . . DOI: 10.1109/MEMSYS.2010.5442517 http://doi.org/10.1109/MEMSYS.2010.5442517 . .

C. Comi , , , A. Corigliano , , , G. Langfelder , , , A. Longoni , , , A. Tocchio , , , B. Simoni . . A New Biaxial Silicon Resonant Micro Accelerometer . . IEEE 24th Int. Conf. on Micro Electro Mechanical Systems , , 2011 . . p.529 - - 533 . . DOI: 10.1109/MEMSYS.2011.5734478 http://doi.org/10.1109/MEMSYS.2011.5734478 . .

G.K. Fedder . . Simulation of Microelectromechanical Systems , , : : Berkeley PhD Thesis, University of California , , 1994 . . .

V. Ferrari , , , A. Ghisla , , , D. Marioli , , , A. Taroni . . Silicon resonant accelerometer with electronic compensation of input-output cross-talk . . Sens. Actuat. A , , 2005 . . 123-124 258 - - 266 . . DOI: 10.1016/j.sna.2005.03.067 http://doi.org/10.1016/j.sna.2005.03.067 . .

P.S. Huang , , , T.L. Ren , , , Q.W. Lou , , , J.S. Liu , , , L.T. Liu , , , Z.J. Li . . Design of a triaxial piezoelectric accelerometer . . Integr. Ferroelectr. , , 2003 . . 56 ( ( 1 ): ): 1115 - - 1122 . . DOI: 10.1080/10584580390259722 http://doi.org/10.1080/10584580390259722 . .

X.X. Li , , , M.H. Bao , , , S.Q. Shen . . Maskless etching of three-dimensional silicon structures in KOH . . Sens. Actuat. A , , 1996 . . 57 ( ( 1 ): ): 47 - - 52 . . DOI: 10.1016/S0924-4247(97)80094-5 http://doi.org/10.1016/S0924-4247(97)80094-5 . .

A. Manut , , , M.I. Syono . . Effects of Mechanical Geometries on Resonance Sensitivity of MEMS Out-of-Plane Accelerometer . . IEEE Int. Conf. on Semiconductor Electronics , , 2006 . . 25 - - 28 . . DOI: 10.1109/SMELEC.2006.381013 http://doi.org/10.1109/SMELEC.2006.381013 . .

G.K. Mayer , , , H.L. Offereings , , , H. Sandmaier , , , K. Kühl . . Fabrication of non-underetched convex corner in anisotropic etching of (100) silicon in aqueous KOH with respect to novel micromechanical elements . . J. Electroch. Soc. , , 1990 . . 137 ( ( 12 ): ): 3947 - - 3951 . . DOI: 10.1149/1.2086334 http://doi.org/10.1149/1.2086334 . .

R.H. Olsson , , , K.E. Wojciechowski , , , M.S. Baker , , , M.R. Tuck , , , J.G. Fleming . . Post-CMOS-compatible aluminum nitride resonant MEMS accelerometers . . J. Microelectromech. Syst. , , 2009 . . 18 ( ( 3 ): ): 671 - - 678 . . DOI: 10.1109/JMEMS.2009.2020374 http://doi.org/10.1109/JMEMS.2009.2020374 . .

D. Pinto , , , D. Mercier , , , C. Kharrat , , , E. Colinet , , , V. Nguyen , , , B. Reig , , , S. Hentz . . A Small and High Sensitivity Resonant Accelerometer . . Proc. Eurosensors 23rd Conf. on Procedia Chemistry , , 2009 . . p.536 - - 539 . . DOI: 10.1016/j.proche.2009.07.134 http://doi.org/10.1016/j.proche.2009.07.134 . .

B. Puers , , , W. Sansen . . Compensation structures for convex corner micromachining in silicon . . Sens. Actuat. A , , 1990 . . 23 ( ( 1-3 ): ): 1036 - - 1041 . . DOI: 10.1016/0924-4247(90)87085-W http://doi.org/10.1016/0924-4247(90)87085-W . .

A. Qiu , , , Y. Su , , , X. Zhu , , , Q. Shi . . Bulk-Micromachined Silicon Resonant Accelerometer . . IEEE Int. Conf. on Information and Automation , , 2009 . . p.1289 - - 1292 . . DOI: 10.1109/ICINFA.2009.5205115 http://doi.org/10.1109/ICINFA.2009.5205115 . .

T.A. Roessig , , , R.T. Howe , , , A.P. Pisano , , , J.H. Smith . . Surface-Micromachined Resonant Accelerometer . . Proc. of Int. Solid State Sensors and Actuators Conf. , , 1997 . . p.859 - - 862 . . DOI: 10.1109/SENSOR.1997.635237 http://doi.org/10.1109/SENSOR.1997.635237 . .

S. Seok , , , K. Chun . . Inertial-grade in-plane resonant silicon accelerometer . . Electr. Lett. , , 2006 . . 42 ( ( 19 ): ): 1092 - - 1094 . . DOI: 10.1049/el:20061774 http://doi.org/10.1049/el:20061774 . .

S. Seok , , , S. Seong , , , B. Lee , , , J. Kim , , , K. Chun . . A High Performance Mixed Micromachined Differential Resonant Accelerometer . . Proc. IEEE Sensors , , 2002 . . p.1058 - - 1063 . . DOI: 10.1109/ICSENS.2002.1037259 http://doi.org/10.1109/ICSENS.2002.1037259 . .

A.A. Seshia , , , M. Palaniapan , , , T.A. Roessig , , , R.T. Howe , , , R.W. Gooch , , , T.R. Schimert , , , S. Montague . . A vacuum packaged surface . . J. Microelectromech. Syst. , , 2002 . . 11 ( ( 6 ): ): 784 - - 793 . . DOI: 10.1109/JMEMS.2002.805207 http://doi.org/10.1109/JMEMS.2002.805207 . .

S.X.P. Su , , , H.S. Yang , , , A.M. Agogino . . A resonant accelerometer with two-stage microleverage mechanisms fabricated by SOI-MEMS technology . . IEEE Sens. J. , , 2005 . . 5 ( ( 6 ): ): 1214 - - 1223 . . DOI: 10.1109/JSEN.2005.857876 http://doi.org/10.1109/JSEN.2005.857876 . .

J. Wang , , , Y. Shang , , , S. Tu , , , L. Liu , , , D. Chen . . Micro- Machined Resonant Accelerometer with High Sensitivity . . 6th IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems , , 2011 . . p.527 - - 530 . . DOI: 10.1109/NEMS.2011.6017409 http://doi.org/10.1109/NEMS.2011.6017409 . .

X.P. Wu , , , W.H. Ko . . Compensating corner undercutting in anisotropic etching of (100) silicon . . Sens. Actuat. , , 1989 . . 18 ( ( 2 ): ): 207 - - 215 . . DOI: 10.1016/0250-6874(89)87019-2 http://doi.org/10.1016/0250-6874(89)87019-2 . .

Q. Zhang , , , L. Liu , , , Z. Li . . A new approach to convex corner compensation for anisotropic etching of (100) Si in KOH . . Sens. Actuat. A , , 1996 . . 56 ( ( 3 ): ): 251 - - 254 . . DOI: 10.1016/S0924-4247(96)01312-X http://doi.org/10.1016/S0924-4247(96)01312-X . .

Views

Downloads

CSCD

Alert me when the article has been cited

Submit

Tools

Publicity Resources

No data

Related Author

No data

Related Institution

No data

Chat

Address：Zhejiang University Press, 148 Tianmushan Road, Hangzhou, China Postal code：310028
Tel：+86-571-88273162 Email：fitee@zju.edu.cn
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰