A planar capacitive sensor for 2D long-range displacement measurement

Jian-ping YU; Wen WANG; Ke-qing LU; De-qing MEI; Zi-chen CHEN

doi:10.1631/jzus.C12MNT03

Your Location：

Home >

Browse articles >

A planar capacitive sensor for 2D long-range displacement measurement

Special Part-Issue for the Chinese Society of Micro-Nano Technology (CSMNT2012) | Updated：2022-05-19

- A planar capacitive sensor for 2D long-range displacement measurement
- A planar capacitive sensor for 2D long-range displacement measurement
- Frontiers of Information Technology & Electronic Engineering Vol. 14, Issue 4, Pages: 252-257(2013)
- Affiliations：
  
  1.Department of Mechanical Engineering, Zhejiang University, Hangzhou 310027, China
  2.School of Mechanical Engineering, Hangzhou Dianzi University, Hangzhou 310018, China
- Author bio：
  
  WANG Wen, E-mail: wangwn@hdu.edu.cn
- Funds：
- DOI：10.1631/jzus.C12MNT03
  CLC： TH711;TB92
- Received：09 October 2012，
  
  Revised：2013-;3-11，
  
  Published：2013-04
- Accepted：
Scan QR Code
Jian-ping YU, Wen WANG, Ke-qing LU, et al. A planar capacitive sensor for 2D long-range displacement measurement[J]. Frontiers of Information Technology & Electronic Engineering, 2013, 14(4): 252-257.
DOI：

Jian-ping YU, Wen WANG, Ke-qing LU, et al. A planar capacitive sensor for 2D long-range displacement measurement[J]. Frontiers of Information Technology & Electronic Engineering, 2013, 14(4): 252-257. DOI： 10.1631/jzus.C12MNT03.

摘要

Abstract

A planar capacitive sensor (PCS) capable of 2D large-scale measurement is presented in this paper. Displacement interpretation depends on independently measuring the periodic variation in capacitance caused by the change in the overlapping area of sensing electrodes on a moving plate and a fixed plate. By accumulating the number of quarters in each direction and the specific position in the final quarter

the large-scale measurement is fulfilled. Displacements in

- and

-direction can be measured independently and simultaneously. Simulation shows that a shorter gap distance and a longer electrode guarantee better sensitivity. Experiments based on a PCS test bench demonstrate that the PCS has a sensitivity of 0.198 mV/μm and a resolution of 0.308 μm. An electric fringe effect and other possible measurement errors on displacement interpretation accuracy are discussed. The study confirms the high potential of PCSs as innovative 2D long-range displacement sensors.

关键词

Keywords

references

L.K. Baxter . . Capacitive Sensors: Design and Applications . . IEEE Press, Piscataway, NJ , , 1997 . . .

P. Benedek , , , P. Silvester . . Capacitance of parallel rectangular plates separated by a dielectric sheet . . IEEE Trans. Microw. Theory Tech. , , 1972 . . 20 ( ( 8 ): ): 504 - - 510 . . DOI: 10.1109/TMTT.1972.1127797 http://doi.org/10.1109/TMTT.1972.1127797 . .

M.H.W. Bonse , , , F. Zhu , , , J.W. Spronck . . A new two-dimensional capacitive position transducer . . Sens. Actuat. A , , 1994 . . 41 ( ( 1-3 ): ): 29 - - 32 . . DOI: 10.1016/0924-4247(94)80082-0 http://doi.org/10.1016/0924-4247(94)80082-0 . .

S. Chang , , , J. Lee . . Design of a long range nano-scale resolution mechanism . . J. Zhejiang Univ.-Sci. A (Appl. Phys. & Eng.) , , 2010 . . 11 ( ( 4 ): ): 250 - - 254 . . DOI: 10.1631/jzus.A1000029 http://doi.org/10.1631/jzus.A1000029 . .

H. Furuichi , , , R.S. Fearing . . A Planar Capacitive Micro Positioning Sensor . . Proc. 7th Int. Symp. on Micro Machine and Human Science , , 1996 . . p.85 - - 90 . . DOI: 10.1109/MHS.1996.563406 http://doi.org/10.1109/MHS.1996.563406 . .

X.H. Huang , , , J.I. Lee , , , N. Ramakrishnan , , , M. Bedillion , , , P. Chu . . Nano-positioning of an electromagnetic scanner with a MEMS capacitive sensor . . Mechatronics , , 2010 . . 20 ( ( 1 ): ): 27 - - 34 . . DOI: 10.1016/j.mechatronics.2009.06.005 http://doi.org/10.1016/j.mechatronics.2009.06.005 . .

M. Kim , , , W. Moon . . A new linear encoder-like capacitive displacement sensor . . Measurement , , 2006 . . 39 ( ( 6 ): ): 481 - - 489 . . DOI: 10.1016/j.measurement.2005.12.012 http://doi.org/10.1016/j.measurement.2005.12.012 . .

P.W. Kolb , , , R.S. Decca , , , H.D. Drew . . Capacitive sensor for micropositioning in two dimensions . . Rev. Sci. Instrum. , , 1998 . . 69 ( ( 1 ): ): 310 - - 312 . . DOI: 10.1063/1.1148515 http://doi.org/10.1063/1.1148515 . .

A.A. Kuijpers , , , G.J.M. Krijnen , , , R.J. Wiegerink , , , T.S.J. Lammerink , , , M. Elwenspoek . . A micromachined capacitive incremental position sensor . . J. Micromech. Microeng. , , 2006 . . 16 ( ( 6 ): ): S116 - - 124 . . DOI: 10.1088/0960-1317/16/6/S18 http://doi.org/10.1088/0960-1317/16/6/S18 . .

H.U. Meyer . . An integrated capacitive position sensor . . IEEE Trans. Instrum. Meas. , , 1996 . . 45 ( ( 2 ): ): 521 - - 525 . . DOI: 10.1109/19.492779 http://doi.org/10.1109/19.492779 . .

A. Pedrocchi , , , S. Hoen , , , G. Ferrigno , , , A. Pedotti . . Perspectives on MEMS in bioengineering: a novel capacitive position microsensor . . IEEE Trans. Biomed. Eng. , , 2000 . . 47 ( ( 1 ): ): 8 - - 11 . . DOI: 10.1109/10.817612 http://doi.org/10.1109/10.817612 . .

G.B. Picotto , , , M. Pisani , , , A. Sosso . . A multi-electrode plane capacitive sensor for displacement measurements and attitude controls . . Meas. Sci. Technol. , , 2009 . . 20 ( ( 8 ): ): 1 - - 4 . . DOI: 10.1088/0957-0233/20/8/084011 http://doi.org/10.1088/0957-0233/20/8/084011 . .

W.M. Tolles . . Nanoscience and nanotechnology in Europe . . Nanotechnology , , 1996 . . 7 ( ( 2 ): ): 59 - - 105 . . DOI: 10.1088/0957-4484/7/2/001 http://doi.org/10.1088/0957-4484/7/2/001 . .

W. Wang , , , X.X. Li , , , Z.C. Chen . . A planar capacitive sensor for large scale measurement . . Key Eng. Mater. , , 2008 . . 381-382 509 - - 512 . . DOI: 10.4028/KEM.381-382.509 http://doi.org/10.4028/KEM.381-382.509 . .

Views

Downloads

CSCD

Alert me when the article has been cited

Submit

Tools

Publicity Resources

Displacement measuring grating interferometer: a review

Related Author

Peng-cheng HU

Di CHANG

Jiu-bin TAN

Rui-tao YANG

Hong-xing YANG

Hai-jin FU

Related Institution

Center of Ultra-precision Optoelectronic Instrument Engineering, Harbin Institute of Technology

Key Lab of Ultra-precision Intelligent Instrumentation, Ministry of Industry and Information Technology

Chat

Address：Zhejiang University Press, 148 Tianmushan Road, Hangzhou, China Postal code：310028
Tel：+86-571-88273162 Email：fitee@zju.edu.cn
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰