Measurement of wireless pressure sensors fabricated in high temperature co-fired ceramic MEMS technology

Ji-jun XIONG; Shi-jun ZHENG; Ying-ping HONG; Jun LI; Ying-lin WANG; Wei WANG; Qiu-lin TAN

doi:10.1631/jzus.C12MNT04

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Measurement of wireless pressure sensors fabricated in high temperature co-fired ceramic MEMS technology

Special Part-Issue for the Chinese Society of Micro-Nano Technology (CSMNT2012) | Updated：2022-12-09

- Measurement of wireless pressure sensors fabricated in high temperature co-fired ceramic MEMS technology
- Measurement of wireless pressure sensors fabricated in high temperature co-fired ceramic MEMS technology
- Frontiers of Information Technology & Electronic Engineering Vol. 14, Issue 4, Pages: 258-263(2013)
- Affiliations：
  
  1.Key Laboratory of Instrumentation Science & Dynamic Measurement, North University of China, Taiyuan 030051, China
  2.MOE Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan 030051, China
  3.The Second Research Institute of China Electronics Technology Group Corporation, Taiyuan 030024, China
- Author bio：
  
  [ "XIONG Ji-jun, E-mail: xiongjijun@nuc.edu.cn" ]
  TANQiu-lin, tanqiulin.99@163.com
- Funds：
- DOI：10.1631/jzus.C12MNT04
  CLC： TP212
- Received：20 September 2012，
  
  Revised：2013-;3-12，
  
  Published：2013-04
- Accepted：
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Ji-jun XIONG, Shi-jun ZHENG, Ying-ping HONG, et al. Measurement of wireless pressure sensors fabricated in high temperature co-fired ceramic MEMS technology[J]. Frontiers of Information Technology & Electronic Engineering, 2013, 14(4): 258-263.
DOI：

Ji-jun XIONG, Shi-jun ZHENG, Ying-ping HONG, et al. Measurement of wireless pressure sensors fabricated in high temperature co-fired ceramic MEMS technology[J]. Frontiers of Information Technology & Electronic Engineering, 2013, 14(4): 258-263. DOI： 10.1631/jzus.C12MNT04.

摘要

Abstract

High temperature co-fired ceramics (HTCCs) have wide applications with stable mechanical properties

but they have not yet been used to fabricate sensors. By introducing the wireless telemetric sensor system and ceramic structure embedding a pressure-deformable cavity

the designed sensors made from HTCC materials (zirconia and 96% alumina) are fabricated

and their capacities for the pressure measurement are tested using a wireless interrogation method. Using the fabricated sensor

a study is conducted to measure the atmospheric pressure in a sealed vessel. The experimental sensitivity of the device is 2 Hz/Pa of zirconia and 1.08 Hz/Pa of alumina below 0.5 MPa with a readout distance of 2.5 cm. The described sensor technology can be applied for monitoring of atmospheric pressure to evaluate important component parameters in harsh environments.

关键词

Keywords

references

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