A trapezoidal cantilever density sensor based on MEMS technology

Li-bo ZHAO; Long-qi XU; Gui-ming ZHANG; Yu-long ZHAO; Xiao-po WANG; Zhi-gang LIU; Zhuang-de JIANG

doi:10.1631/jzus.C12MNT06

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A trapezoidal cantilever density sensor based on MEMS technology

Special Part-Issue for the Chinese Society of Micro-Nano Technology (CSMNT2012) | Updated：2022-12-09

- A trapezoidal cantilever density sensor based on MEMS technology
- A trapezoidal cantilever density sensor based on MEMS technology
- Frontiers of Information Technology & Electronic Engineering Vol. 14, Issue 4, Pages: 274-278(2013)
- Affiliations：
  
  1.State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China
  2.MOE Key Laboratory of Thermo-Fluid Science and Engineering, Xi'an Jiaotong University, Xi'an 710049, China
- Author bio：
  
  [ "ZHAO Li-bo, E-mail: libozhao@mail.xjtu.edu.cn" ]
  [ "XU Long-qi, hezexulongqi@stu.xjtu.edu.cn" ]
- Funds：
- DOI：10.1631/jzus.C12MNT06
  CLC： TH81
- Received：24 September 2012，
  
  Revised：2013-;3-22，
  
  Published：2013-04
- Accepted：
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Li-bo ZHAO, Long-qi XU, Gui-ming ZHANG, et al. A trapezoidal cantilever density sensor based on MEMS technology[J]. Frontiers of Information Technology & Electronic Engineering, 2013, 14(4): 274-278.
DOI：

Li-bo ZHAO, Long-qi XU, Gui-ming ZHANG, et al. A trapezoidal cantilever density sensor based on MEMS technology[J]. Frontiers of Information Technology & Electronic Engineering, 2013, 14(4): 274-278. DOI： 10.1631/jzus.C12MNT06.

摘要

Abstract

A trapezoidal cantilever density sensor is developed based on micro-electro-mechanical systems (MEMS) technology. The sensor measures fluid density through the relationship between the density and the resonant frequency of the cantilever immersed in the fluid. To improve the sensitivity of the sensor

the modal and harmonic response analyses of trapezoidal and rectangular cantilevers are simulated by ANSYS software. The higher the resonant frequency of the cantilever immersed in the fluid

the higher the sensitivity of the sensor; the higher the resonant strain value

the easier the detection of the output signal of the sensor. Based on the results of simulation

the trapezoidal cantilever is selected to measure the densities of dimethyl silicone and toluene at the temperature ranges of 30 to 55 ℃ and 26 to 34 ℃

respectively. Experimental results show that the trapezoidal cantilever density sensor has a good performance.

关键词

Keywords

references

S. Brandstetter , , , C. Riesch , , , E.K. Reichel . . Sensing viscosity and density with a micromachined suspended plate resonator . . Proc. Chem. , , 2009 . . 1 ( ( 1 ): ): 1467 - - 1470 . . DOI: 10.1016/j.proche.2009.07.366 http://doi.org/10.1016/j.proche.2009.07.366 . .

A.M. Cao-Paz , , , L. Rodríguez-Pardo , , , J. Faria , , , J. Marcos-Acevedo . . Resolution in QCM sensors for the viscosity and density of liquids: application to lead acid batteries . . Sensors , , 2012 . . 12 ( ( 8 ): ): 10604 - - 10620 . . DOI: 10.3390/s120810604 http://doi.org/10.3390/s120810604 . .

T. Corman , , , P. Enoksson , , , K. Noren , , , G. Stemme . . A low-pressure encapsulated resonant fluid density sensor with feedback control electronics . . Meas. Sci. Technol. , , 2000 . . 11 ( ( 3 ): ): 205 - - 211 . . DOI: 10.1088/0957-0233/11/3/306 http://doi.org/10.1088/0957-0233/11/3/306 . .

M.K. Ghatkesar , , , E. Rakhmatullina , , , H.P. Lang , , , C. Gerber , , , M. Hegner , , , T. Braun . . Multi-parameter micro cantilever sensor for comprehensive characterization of Newtonian fluids . . Sens. Actuat. B , , 2008 . . 135 ( ( 1 ): ): 133 - - 138 . . DOI: 10.1016/j.snb.2008.08.012 http://doi.org/10.1016/j.snb.2008.08.012 . .

A.R.H. Goodwin , , , E.P. Donzier , , , O. Vancauwenberghe . . A vibrating edge supported plate, fabricated by the methods of micro electro mechanical system for the simultaneous measurement of density and viscosity: results for methylbenzene and octane at temperatures between (323 and 423) K and pressures in the range (0.1 to 68) MPa . . J. Chem. Eng. Data , , 2006 . . 51 ( ( 1 ): ): 190 - - 208 . . DOI: 10.1021/je0503296 http://doi.org/10.1021/je0503296 . .

C. Harrison , , , R. Seungoh , , , A. Goodwin , , , K. Hsu , , , E. Donzier , , , F. Marty , , , B. Mercier . . A MEMS sensor for the measurement of density-viscosity for oilfield applications . . SPIE , , 2006 . . 6111 61110D-1 - - 61110D-11 . . DOI: 10.1117/12.645080 http://doi.org/10.1117/12.645080 . .

M. Heinisch , , , E.K. Reichel , , , I. Dufour , , , B. Jakoby . . A resonating rheometer using two polymer membranes for measuring liquid viscosity and mass density . . Sens. Actuat. A , , 2011 . . 172 ( ( 1 ): ): 82 - - 87 . . DOI: 10.1016/j.sna.2011.02.031 http://doi.org/10.1016/j.sna.2011.02.031 . .

K. Igarashi , , , K. Kawashima , , , T. Kagawa . . Development of simultaneous measurement system for instantaneous density, viscosity and flow rate of gases . . Sens. Actuat. A , , 2007 . . 140 ( ( 1 ): ): 1 - - 7 . . DOI: 10.1016/j.sna.2007.06.017 http://doi.org/10.1016/j.sna.2007.06.017 . .

H. Li , , , J. Wang , , , X. Li , , , D. Chen . . Viscosity-density sensor with resonant torsional paddle for direct detection in liquid . . IET Nanobiotechnol. , , 2011 . . 5 ( ( 4 ): ): 121 - - 125 . . DOI: 10.1049/iet-nbt.2011.0016 http://doi.org/10.1049/iet-nbt.2011.0016 . .

H.S. Liao , , , K.Y. Huang , , , C.S. Chang . . Cantilever-Based Mass Sensor Using High Order Resonances for Liquid Environment . . IEEE/ASME Int. Conf. on Advanced Intelligent Mechatronics , , 2011 . . p.652 - - 655 . . DOI: 10.1109/AIM.2011.6026984 http://doi.org/10.1109/AIM.2011.6026984 . .

M. Najmzadeh , , , S. Haasl , , , P. Enoksson . . A silicon straight tube fluid density sensor . . J. Micromech. Microeng. , , 2007 . . 17 ( ( 8 ): ): 1657 DOI: 10.1088/0960-1317/17/8/032 http://doi.org/10.1088/0960-1317/17/8/032 . .

G. Rezazadeh , , , M. Ghanbari , , , I. Mirzaee , , , A. Keyvani . . On the modeling of a piezoelectrically actuated microsensor for simultaneous measurement of fluids viscosity and density . . Measurement , , 2010 . . 43 ( ( 10 ): ): 1516 - - 1524 . . DOI: 10.1016/j.measurement.2010.08.022 http://doi.org/10.1016/j.measurement.2010.08.022 . .

P. Rust , , , J. Dual . . Novel Method for Gated Inductive Readout for Highly Sensitive and Low Cost Viscosity and Density Sensors . . 16th Int. Solid-State Sensors, Actuators and Microsystems Conf. , , 2011 . . p.1088 - - 1091 . . DOI: 10.1109/TRANSDUCERS.2011.5969181 http://doi.org/10.1109/TRANSDUCERS.2011.5969181 . .

D. Sparks , , , R. Smith , , , R. Schneider , , , J. Cripe , , , A.S. Massoud , , , A. Chimbayo , , , N. Najafi . . A variable temperature, resonant density sensor made using an improved chip- level vacuum package . . Sens. Actuat. A , , 2003 . . 107 ( ( 2 ): ): 119 - - 124 . . DOI: 10.1016/S0924-4247(03)00350-9 http://doi.org/10.1016/S0924-4247(03)00350-9 . .

D. Sparks , , , R. Smith , , , J. Patel , , , N. Najafi . . A MEMS- based low pressure, light gas density and binary concentration sensor . . Sens. Actuat. A , , 2011 . . 171 ( ( 2 ): ): 159 - - 162 . . DOI: 10.1016/j.sna.2011.08.011 http://doi.org/10.1016/j.sna.2011.08.011 . .

K. Waszczuk , , , T. Piasecki , , , K. Nitsch , , , T. Gotszalk . . Application of piezoelectric tuning forks in liquid viscosity and density measurements . . Sens. Actuat. B , , 2011 . . 160 ( ( 1 ): ): 517 - - 523 . . DOI: 10.1016/j.snb.2011.08.020 http://doi.org/10.1016/j.snb.2011.08.020 . .

W.H. Waugh , , , B.J. Gallacher , , , J.S. Burdess . . A high- sensitivity resonant sensor realized through the exploitation of nonlinear dynamic behaviour . . Meas. Sci. Technol. , , 2011 . . 22 ( ( 10 ): ): 105202 DOI: 10.1088/0957-0233/22/10/105202 http://doi.org/10.1088/0957-0233/22/10/105202 . .

L. Wilson , , , A. Campbell , , , R. Mutharasan . . Viscosity and density values from excitation level response of piezoelectric-excited cantilever sensors . . Sens. Actuat. A , , 2007 . . 138 ( ( 1 ): ): 44 - - 51 . . DOI: 10.1016/j.sna.2007.04.050 http://doi.org/10.1016/j.sna.2007.04.050 . .

A. Zribi , , , A. Knobloch , , , W.C. Tian , , , S. Goodwin . . Micromachined resonant multiple gas sensor . . Sens. Actuat. A , , 2005 . . 122 ( ( 1 ): ): 31 - - 38 . . DOI: 10.1016/j.sna.2004.12.034 http://doi.org/10.1016/j.sna.2004.12.034 . .

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