一种新型转子式陀螺的分辨率为0.47′′ 的转子微偏转角度检测方法

李海; 刘晓为; 翁睿; 张海峰

doi:10.1631/FITEE.1500454

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一种新型转子式陀螺的分辨率为0.47′′ 的转子微偏转角度检测方法

常规文章 | Updated：2022-05-19

- 一种新型转子式陀螺的分辨率为0.47′′ 的转子微偏转角度检测方法
- Micro-angle tilt detection for the rotor of a novel rotational gyroscope with a 0.47″ resolution
- 信息与电子工程前沿（英文） 2017年18卷第5期页码：591-598
- Affiliations：
  
  1MEMS Center, Harbin Institute of Technology, Harbin 150001, China
  2MOE Key Laboratory of Micro-Systems and Micro-Structures Manufacturing, Harbin 150001, China
- Author bio：
  
  E-mail:zhanghf@hit.edu.cn
- Funds：
  
  Project supported by the National Natural Basic Research Program (973) of China (No. 2012CB934104), the National Natural Science Foundation of China (No. 61071037), and the Natural Science Foundation of Heilongjiang Province, China (No. F201418)
- DOI：10.1631/FITEE.1500454
  中图分类号： TP212.1
- 收稿：2015-12-11，
  
  录用：2016-3-20，
  
  纸质出版：2017-05
- Accepted：
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李海, 刘晓为, 翁睿, 等. 一种新型转子式陀螺的分辨率为0.47′′ 的转子微偏转角度检测方法[J]. 信息与电子工程前沿（英文）, 2017,18(5):591-598.

Hai LI, Xiao-wei LIU, Rui WENG, et al. Micro-angle tilt detection for the rotor of a novel rotational gyroscope with a 0.47″ resolution[J]. Frontiers of Information Technology & Electronic Engineering, 2017, 18(5): 591-598.
李海, 刘晓为, 翁睿, 等. 一种新型转子式陀螺的分辨率为0.47′′ 的转子微偏转角度检测方法[J]. 信息与电子工程前沿（英文）, 2017,18(5):591-598. DOI： 10.1631/FITEE.1500454.

Hai LI, Xiao-wei LIU, Rui WENG, et al. Micro-angle tilt detection for the rotor of a novel rotational gyroscope with a 0.47″ resolution[J]. Frontiers of Information Technology & Electronic Engineering, 2017, 18(5): 591-598. DOI： 10.1631/FITEE.1500454.

摘要

差分电容检测被广泛应用于振动陀螺仪质量块的位移测量，然而由于结构、理论以及接口电路等因素的限制其在转子式陀螺所需的转子偏转角度检测方面还尚未取得较高分辨率。本文提出了一种差分电容检测结构，用以测量一种新型转子式陀螺转子的偏转角度。本文建立了结构电容与转子偏转角度之间关系的数学模型，分析了差分电容与结构参数之间的关系，并获得了初步优化的尺寸参数。设计了一款低噪声读出接口电路将差分电容的变化转换为电压信号。对陀螺仪的转台测试结果表明，该角度检测结构的最小可分辨的偏转角度小于0.47′′ (0.00013°)，三次多项式补偿后检测结构的非线性可达0.33%，并可进一步提高。结果表明该检测结构和电路有助于实现该陀螺仪的高精度。

Abstract

Differential capacitive detection has been widely used in the displacement measurement of the proof mass of vibratory gyroscopes

but it did not achieve high resolutions in angle detection of rotational gyroscopes due to restrictions in structure

theory

and interface circuitry. In this paper

a differential capacitive detection structure is presented to measure the tilt angle of the rotor of a novel rotational gyroscope. A mathematical model is built to study how the structure's capacitance changes with the rotor tilt angles. The relationship between differential capacitance and structural parameters is analyzed

and preliminarily optimized size parameters are adopted. A lownoise readout interface circuit is designed to convert differential capacitance changes to voltage signals. Rate table test results of the gyroscope show that the smallest resolvable tilt angle of the rotor is less than 0.47″ (0.00013°)

and the nonlinearity of the angle detection structure is 0.33%

which can be further improved. The results indicate that the proposed detection structure and the circuitry are helpful for a high accuracy of the gyroscope.

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