一种用于抑制相移误差和零级串扰的相移算法通用设计方法

方超; 向阳; 齐克奇

doi:10.1631/FITEE.1601692

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一种用于抑制相移误差和零级串扰的相移算法通用设计方法

常规文章 | Updated：2022-05-19

- 一种用于抑制相移误差和零级串扰的相移算法通用设计方法
- A general method of designing phase-shifting algorithms for grating lateral shearing interferometry
- 信息与电子工程前沿（英文） 2018年19卷第6期页码：809-814
- Affiliations：
  
  State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
  University of Chinese Academy of Sciences, Beijing 100039, China
- Author bio：
  
  Yang XIANG, E-mail: xiangy@sklao.ac.cn
- Funds：
  
  Project supported by the National Science and Technology Major Project, China (No. 2009ZX02202005)
- DOI：10.1631/FITEE.1601692
  中图分类号： O436
- 收稿：2016-11-07，
  
  修回：2018-;6-;8，
  
  纸质出版：2018-06
- Accepted：
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方超, 向阳, 齐克奇. 一种用于抑制相移误差和零级串扰的相移算法通用设计方法[J]. 信息与电子工程前沿（英文）, 2018,19(6):809-814.

Chao FANG, Yang XIANG, Ke-qi QI. A general method of designing phase-shifting algorithms for grating lateral shearing interferometry[J]. Frontiers of Information Technology & Electronic Engineering, 2018, 19(6): 809-814.
方超, 向阳, 齐克奇. 一种用于抑制相移误差和零级串扰的相移算法通用设计方法[J]. 信息与电子工程前沿（英文）, 2018,19(6):809-814. DOI： 10.1631/FITEE.1601692.

Chao FANG, Yang XIANG, Ke-qi QI. A general method of designing phase-shifting algorithms for grating lateral shearing interferometry[J]. Frontiers of Information Technology & Electronic Engineering, 2018, 19(6): 809-814. DOI： 10.1631/FITEE.1601692.

摘要

为降低零级串扰和相移误差对光栅横向剪切干涉仪波前复原精度的影响，进一步提升光栅横向剪切干涉仪检测光刻镜头系统波像差精度，推导出一种设计光栅剪切干涉相移算法的一般表达式，给出相移算法的具体设计方法。根据该表达式和设计方法，可以针对不同的零级串扰和相移误差建立相应的4种相移算法，实现高精度系统波像差检测。同时设计和评价了一种新的13步相移算法，结果证明所推导的一般表达式的有效性和先进性。

Abstract

We propose a general method of designing phase-shifting algorithms for grating lateral shearing interferometry. The algorithms compensate for the zeroth-order effect error and phase-shifting error in varying degrees. We derive a general expression of the phase-shifting algorithm in grating lateral shearing interferometer and introduce the corresponding design method. Based on the expression and method

four phase-shifting algorithms are designed with different phase-shifting errors to obtain high measurement accuracy. A new 13-frame phase-shifting algorithm is designed and simulated with a large zeroth-order effect. Simulation results verify the general expression and the corresponding design method.

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references

F Bai , , , X Wang , , , K Huang , , , 等 . . Analysis of spatial resolution and pinhole size for single-shot pointdiffraction interferometer using in closed-loop adaptive optics . . Opt Commun , , 2013 . . 297 27 - - 31 . . DOI: 10.1016/j.optcom.2013.01.070 http://doi.org/10.1016/j.optcom.2013.01.070 . .

JM Bueno , , , E Acosta , , , C Schwarz , , , 等 . . Wavefront measurements of phase plates combining a pointdiffraction interferometer and a Hartmann-Shack sensor . . Appl Opt , , 2010 . . 49 ( ( 3 ): ): 450 - - 456 . . DOI: 10.1364/AO.49.000450 http://doi.org/10.1364/AO.49.000450 . .

F Dai , , , J Li , , , X Wang , , , 等 . . Exact two-dimensional zonal wavefront reconstruction with high spatial resolution in lateral shearing interferometry . . Opt Commun , , 2016 . . 367 264273 DOI: 10.1016/j.optcom.2016.01.068 http://doi.org/10.1016/j.optcom.2016.01.068 . .

C Fang , , , Y Xiang , , , K Qi , , , 等 . . An 11-frame phase shifting algorithm in lateral shearing interferometry . . Opt Expr , , 2013 . . 21 ( ( 23 ): ): 28325 - - 28333 . . DOI: 10.1364/OE.21.028325 http://doi.org/10.1364/OE.21.028325 . .

T Fujii , , , J Kougo , , , Y Mizuno , , , 等 . . Portable phase measuring interferometer using Shack-Hartmann method . . Proc SPIE , , 2003 . . 5038 726 - - 732 . . DOI: 10.1117/12.482699 http://doi.org/10.1117/12.482699 . .

P Gao , , , I Harder , , , V Nercissian , , , 等 . . Phase-shifting point-diffraction interferometry with common-path and in-line configuration for microscopy . . Opt Lett , , 2010 . . 35 ( ( 5 ): ): 712714 DOI: 10.1364/OL.35.000712 http://doi.org/10.1364/OL.35.000712 . .

KA Goldberg , , , P Naulleau , , , P Denham , , , 等 . . EUV interferometric testing and alignment of the 0 . . 3-NA MET optic. Proc SPIE , , 2004 . . 5374 64 - - 73 . . DOI: 10.1117/12.546199 http://doi.org/10.1117/12.546199 . .

M Hasegawa , , , C Ouchi , , , T Hasegawa , , , 等 . . Recent progress of EUV wave-front metrology in EUVA . . Proc SPIE , , 2004 . . 5533 27 - - 36 . . DOI: 10.1117/12.562431 http://doi.org/10.1117/12.562431 . .

T Hasegawa , , , C Ouchi , , , M Hasegawa , , , 等 . . EUV wavefront metrology system in EUVA . . Proc SPIE , , 2004 . . 5374 797807 DOI: 10.1117/12.536327 http://doi.org/10.1117/12.536327 . .

SH Lee , , , P Naulleau , , , KA Goldberg , , , 等 . . Phase-shifting point-diffraction interferometry at 193 nm . . Appl Opt , , 2000 . . 39 ( ( 31 ): ): 5768 - - 5772 . . DOI: 10.1364/AO.39.005768 http://doi.org/10.1364/AO.39.005768 . .

J Li , , , Y Gong , , , H Chen , , , 等 . . Wave-front reconstruction with Hartmann-Shack sensor using a phase-retrieval method . . Opt Commun , , 2015 . . 336 127 - - 133 . . DOI: 10.1016/j.optcom.2014.09.086 http://doi.org/10.1016/j.optcom.2014.09.086 . .

R Miyakawa , , , P Naulleau , , , K Goldberg . . Analysis of systematic errors in lateral shearing interferometry for EUV optical testing . . Proc SPIE , , 2009 . . 7272 72721V DOI: 10.1117/12.812340 http://doi.org/10.1117/12.812340 . .

H Schreiber , , , J Schwider . . Lateral shearing interferometer based on two Ronchi gratings in series . . Appl Opt , , 1997 . . 36 ( ( 22 ): ): 5321 - - 5324 . . DOI: 10.1364/AO.36.005321 http://doi.org/10.1364/AO.36.005321 . .

M Takeda , , , S Kobayashi . . Lateral aberration measurements with a digital Talbot interferometer . . Appl Opt , , 1984 . . 23 ( ( 11 ): ): 1760 - - 1764 . . DOI: 10.1364/AO.23.001760 http://doi.org/10.1364/AO.23.001760 . .

F Wang , , , X Wang , , , M Ma , , , 等 . . Aberration measurement of projection optics in lithographic tools by use of an alternating phase-shifting mask . . Appl Opt , , 2006 . . 45 ( ( 2 ): ): 281 - - 287 . . DOI: 10.1364/AO.45.000281 http://doi.org/10.1364/AO.45.000281 . .

Y Zhu , , , T Gemma . . Method for designing errorcompensating phase-calculation algorithms for phaseshifting interferometry . . Appl Opt , , 2001 . . 40 ( ( 25 ): ): 4540 - - 4546 . . DOI: 10.1364/AO.40.004540 http://doi.org/10.1364/AO.40.004540 . .

Y Zhu , , , K Sugisakia , , , C Ouchia , , , 等 . . Lateral shearing interferometer for EUVL: theoretical analysis and experiment . . Proc SPIE , , 2004 . . 5374 824 - - 832 . . DOI: 10.1117/12.537331 http://doi.org/10.1117/12.537331 . .

Y Zhu , , , K Sugisaki , , , M Okada , , , 等 . . Wavefront measurement interferometry at the operational wavelength of extreme-ultraviolet lithography . . Appl Opt , , 2007 . . 46 ( ( 27 ): ): 6783 - - 6792 . . DOI: 10.1364/AO.46.006783 http://doi.org/10.1364/AO.46.006783 . .

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