具有超小弯曲半径的10通道硅基集成模分复用器件

李晨蕾; 江小辉; 徐雍; 陈冠宏; 邹志伟; 戴道锌

doi:10.1631/FITEE.1800386

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具有超小弯曲半径的10通道硅基集成模分复用器件

光电子器件与集成专题 | Updated：2022-05-19

- 具有超小弯曲半径的10通道硅基集成模分复用器件
- Ten-channel mode-division-multiplexed silicon photonic integrated circuit with sharp bends
- 信息与电子工程前沿（英文） 2019年20卷第4期页码：498-506
- Affiliations：
  
  Centre for Optical and Electromagnetic Research, State Key Laboratory for Modern Optical Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310058, China
  Ningbo Research Institute, Zhejiang University, Ningbo 315100, China
  Department of Photonics and Institute of Electro-Optical Engineering, Chiao Tung University, Hsinchu 30010, Taiwan, China
- Author bio：
  
  [ "Chen-lei LI, E-mail: lichenlei@zju.edu.cn" ]
  [ "Xiao-hui JIANG, E-mail: xiaohuijiang@zju.edu.cn" ]
  [ "Yung HSU, E-mail: matrtihewl0937@gmail.com" ]
  [ "Guan-hong CHEN, E-mail: sscssc82@yahoo.com.tw" ]
  [ "Chi-wai CHOW, E-mail: cwchow@faculty.nctu.edu.tw" ]
  Dao-xin DAI, E-mail: dxdai@zju.edu.cn
- Funds：
  
  Project supported by the National Science Fund for Distinguished Young Scholars (No. 61725503), the Zhejiang Provincial Natural Science Foundation, China (No. LZ18F050001), the National Natural Science Foundation of China (Nos. 61431166001 and 1171101320), and the National Major Research and Development Program, China (No. 2016YFB0402502)
- DOI：10.1631/FITEE.1800386
  中图分类号： O439
- 收稿：2018-07-14，
  
  修回：2019-;4-11，
  
  纸质出版：2019-04
- Accepted：
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李晨蕾, 江小辉, 徐雍, 等. 具有超小弯曲半径的10通道硅基集成模分复用器件[J]. 信息与电子工程前沿（英文）, 2019,20(4):498-506.

Chen-lei LI, Xiao-hui JIANG, Yung HSU, et al. Ten-channel mode-division-multiplexed silicon photonic integrated circuit with sharp bends[J]. Frontiers of Information Technology & Electronic Engineering, 2019, 20(4): 498-506.
李晨蕾, 江小辉, 徐雍, 等. 具有超小弯曲半径的10通道硅基集成模分复用器件[J]. 信息与电子工程前沿（英文）, 2019,20(4):498-506. DOI： 10.1631/FITEE.1800386.

Chen-lei LI, Xiao-hui JIANG, Yung HSU, et al. Ten-channel mode-division-multiplexed silicon photonic integrated circuit with sharp bends[J]. Frontiers of Information Technology & Electronic Engineering, 2019, 20(4): 498-506. DOI： 10.1631/FITEE.1800386.

摘要

为实现多通道片上信号传输，设计一种多模硅光集成器件（PIC），包括一对10通道片上模式多路复用-解复用器以及具有超小弯曲半径的总线波导。选择多模总线波导宽度使其能支持10种模式，其中包括4种横磁（TM）和6种横电（TE）偏振模式。多模总线波导由基于修正的欧拉曲线超小弯曲半径组成。实验结果表明，即使组成总线波导的弯曲半径仅为40µm，该芯片仍可在大带宽1520−1610 nm上实现10通道传输，且具有约−20 dB的低模间串扰。与传统弯曲半径相同的圆弧弯曲相比，该集成器件有明显优势。

Abstract

A multimode silicon photonic integrated circuit (PIC) comprising a pair of on-chip mode (de)multiplexers with 10-mode channels and a multimode bus waveguide with sharp bends is demonstrated to enable multi-channel on-chip transmissions. The core width of the multimode bus waveguide is chosen such that it can support 10 guided modes

of which there are four transverse-magnetic polarization modes and six transverse-electric polarization modes. This multimode bus waveguide comprises sharp bends based on modified Euler curves. Experimental results demonstrate that the present silicon PIC enables the 10-channel on-chip transmission with a low inter-mode crosstalk of approximately 20 dB over a broad bandwidth of 1520–1610 nm even when the bending radius of the S-bend is as small as 40 μm. Compared with a silicon PIC using a conventional arc-bend with the same bending radius

our proposed PIC demonstrates a significant improvement.

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