硅基石墨烯调制器

舒浩文; 金明; 陶源盛; 王兴军

doi:10.1631/FITEE.1800407

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硅基石墨烯调制器

光电子器件与集成专题 | Updated：2022-05-19

- 硅基石墨烯调制器
- Graphene-based silicon modulators
- 信息与电子工程前沿（英文） 2019年20卷第4期页码：458-471
- Affiliations：
  
  State Key Laboratory on Advanced Optical Communication Systems and Networks, Department of Electronics, School of Electronics Engineering and Computer Science, Peking University, Beijing 100871, China
  Nano-optoelectronics Frontier Center of Ministry of Education at Peking University, Beijing 100871, China
- Author bio：
  
  [ "Hao-wen SHU, E-mail: haowenshu@pku.edu.cn" ]
  [ "Ming JIN, E-mail: mjin@pku.edu.cn" ]
  [ "Yuan-sheng TAO, E-mail: ystao@pku.edu.cn" ]
  Xing-jun WANG, E-mail: xjwang@pku.edu.cn
- Funds：
  
  Project supported by the National Natural Science Foundation of China (Nos. 61535002 and 61635001)
- DOI：10.1631/FITEE.1800407
  中图分类号： O436.4
- 收稿：2018-06-28，
  
  修回：2019-;4-11，
  
  纸质出版：2019-04
- Accepted：
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舒浩文, 金明, 陶源盛, 等. 硅基石墨烯调制器[J]. 信息与电子工程前沿（英文）, 2019,20(4):458-471.

Hao-wen SHU, Ming JIN, Yuan-sheng TAO, et al. Graphene-based silicon modulators[J]. Frontiers of Information Technology & Electronic Engineering, 2019, 20(4): 458-471.
舒浩文, 金明, 陶源盛, 等. 硅基石墨烯调制器[J]. 信息与电子工程前沿（英文）, 2019,20(4):458-471. DOI： 10.1631/FITEE.1800407.

Hao-wen SHU, Ming JIN, Yuan-sheng TAO, et al. Graphene-based silicon modulators[J]. Frontiers of Information Technology & Electronic Engineering, 2019, 20(4): 458-471. DOI： 10.1631/FITEE.1800407.

摘要

为满足下一代光互联技术高带宽、低功耗的需求，基于金属互补氧化物半导体（CMOS）工艺的硅基光电子技术有望实现光电器件大规模、高密度集成，在高速率数据传输方面带来新突破。硅基调制器是硅基光电子学的核心器件之一，然而传统基于等离子色散效应的硅基耗尽式调制器在带宽、尺寸和功耗方面存在一定限制，影响传输系统整体性能。为解决该问题，石墨烯被引入硅基光电子器件的材料体系，其优异的电学传输特性和光电特性有效提升传统硅基光调制器单元器件性能。我们总结了基于热光、电光、等离子体等硅基石墨烯调制器的最新进展，其出色性能使硅基石墨烯调制器有望成为下一代片上及片外光互连技术的候选方案。

Abstract

Silicon photonics is a promising technology to address the demand for dense and integrated nextgeneration optical interconnections due to its complementary-metal-oxide-semiconductor (CMOS) compatibility. However

one of the key building blocks

the silicon modulator

suffers from several drawbacks

including a limited bandwidth

a relatively large footprint

and high power consumption. The graphene-based silicon modulator

which benefits from the excellent optical properties of the two-dimensional graphene material with its unique band structure

has significantly advanced the above critical figures of merit. In this work

we review the state-of-the-art graphenebased silicon modulators operating in various mechanisms

i.e.

thermal-optical

electro-optical

and plasmonic. It is shown that graphene-based silicon modulators possess the potential to have satisfactory characteristics in intra-and inter-chip connections.

关键词

Keywords

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