光电子平台与工艺技术

时文华; 吕伟明; 孙天玉; 张宝顺

doi:10.1631/FITEE.1800451

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光电子平台与工艺技术

光电子器件与集成专题 | Updated：2022-05-19

- 光电子平台与工艺技术
- Optoelectronic platform and technology
- 信息与电子工程前沿（英文） 2019年20卷第4期页码：439-457
- Affiliations：
  
  Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou 215123, China
- Author bio：
  
  [ "Bao-shun ZHANG, E-mail: bszhang2006@sinano.ac.cn" ]
- Funds：
  
  Project supported by the National Natural Science Foundation of China (Nos. 61704185 and 51802341)
- DOI：10.1631/FITEE.1800451
  中图分类号： TB13
- 收稿：2018-07-27，
  
  修回：2019-;4-11，
  
  纸质出版：2019-04
- Accepted：
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时文华, 吕伟明, 孙天玉, 等. 光电子平台与工艺技术[J]. 信息与电子工程前沿（英文）, 2019,20(4):439-457.

Wen-hua SHI, Wei-ming LV, Tian-yu SUN, et al. Optoelectronic platform and technology[J]. Frontiers of Information Technology & Electronic Engineering, 2019, 20(4): 439-457.
时文华, 吕伟明, 孙天玉, 等. 光电子平台与工艺技术[J]. 信息与电子工程前沿（英文）, 2019,20(4):439-457. DOI： 10.1631/FITEE.1800451.

Wen-hua SHI, Wei-ming LV, Tian-yu SUN, et al. Optoelectronic platform and technology[J]. Frontiers of Information Technology & Electronic Engineering, 2019, 20(4): 439-457. DOI： 10.1631/FITEE.1800451.

摘要

光电子技术是由光子技术和电子技术结合形成的一门新技术。光子技术将取代电子技术，引发一场新的产业革命，给工业和社会带来巨大冲击。我们回顾光电子器件与集成技术的发展历程，对比分析光电子工艺平台的发展与特点，总结关键性制造工艺，介绍具有代表性的光电器件，并聚焦光电子技术发展亟待突破的关键技术。通过对光电子技术发展的全面梳理，认为我国应抓住机遇，实现光电子技术产业转型升级。借鉴国外先进光电子平台和技术发展经验，加快布局人才储备，注重基础工艺积累，整合建立国家级光电子技术平台，大幅提升我国光器件国产化水平和自主创新能力。

Abstract

Optoelectronic technology is a new technology formed by the combination of photon technology and electronic technology. Photon technology can cause an industrial revolution that supersedes electronic technology

because it will have a deeper impact on industry and society. We review the development of optoelectronic devices and integration technologies. We compare and analyze the development and characteristics of optoelectronic technology platforms

summarize the key manufacturing technologies

introduce several representative optoelectronic devices including flexible devices

and focus on the key breakthrough technologies that need to be achieved. Through a comprehensive review of the development of optoelectronic technology

China should seize the opportunity for a transformation of the optoelectronic technology industry. By drawing on the experiences with advanced optoelectronic platforms and technologies in foreign countries

we should speed up the accumulation and reserves of Chinese industrial talents

pay attention to the accumulation of basic technology

and establish a national optoelectronic technology platform

to greatly enhance domestic levels in these regards and to achieve independent innovations with these devices.

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Keywords

references

M Asghari , , , AV Krishnamoorthy . . Energy-efficient communication . . Nat Photon , , 2011 . . 5 ( ( 5 ): ): 268 - - 270 . . DOI: 10.1038/nphoton.2011.68 http://doi.org/10.1038/nphoton.2011.68 . .

AH Atabaki , , , S Moazeni , , , F Pavanello , , , 等 . . Integrating photonics with silicon nanoelectronics for the next generation of systems on a chip . . Nature , , 2018 . . 556 ( ( 7701 ): ): 349 - - 354 . . DOI: 10.1038/s41586-018-0028-z http://doi.org/10.1038/s41586-018-0028-z . .

M Bayindir , , , F Sorin , , , AF Abouraddy , , , 等 . . Metal-insulator-semiconductor optoelectronic fibres . . Nature , , 2004 . . 431 ( ( 7010 ): ): 826 - - 829 . . DOI: 10.1038/nature02937 http://doi.org/10.1038/nature02937 . .

W Bogaerts , , , L Chrostowski . . Silicon photonics circuit design: methods, tools and challenges . . Laser Photon Rev , , 2018 . . 12 ( ( 4 ): ): 1700237 DOI: 10.1002/lpor.201700237 http://doi.org/10.1002/lpor.201700237 . .

Y Cai , , , ZH Han , , , XX Wang , , , 等 . . Analysis of threshold current behavior for bulk and quantum-well germanium laser structures . . IEEE J Sel Top Quant Electr , , 2013 . . 19 ( ( 4 ): ): 1901009 DOI: 10.1109/JSTQE.2013.2247573 http://doi.org/10.1109/JSTQE.2013.2247573 . .

JC Cardoso , , , CA Grimes , , , XJ Feng , , , 等 . . Fabrication of coaxial TiO 2 /Sb 2 S 3 nanowire hybrids for efficient nanostructured organic–inorganic thin film photovoltaics . . Chem Commun , , 2012 . . 48 ( ( 22 ): ): 2818 - - 2820 . . DOI: 10.1039/C2CC17573H http://doi.org/10.1039/C2CC17573H . .

L Chen , , , A Sohdi , , , JE Bowers , , , 等 . . Electronic and photonic integrated circuits for fast data center optical circuit switches . . IEEE Commun Mag , , 2013 . . 51 ( ( 9 ): ): 53 - - 59 . . DOI: 10.1109/MCOM.2013.6588650 http://doi.org/10.1109/MCOM.2013.6588650 . .

Z Cui . . Micro-Nanofabrication Technologies and Applications , , : : Beijing, China Higher Education Press , , 2005 . . .

SR Forrest . . The path to ubiquitous and low-cost organic electronic appliances on plastic . . Nature , , 2004 . . 428 ( ( 6986 ): ): 911 - - 918 . . DOI: 10.1038/nature02498 http://doi.org/10.1038/nature02498 . .

C Gunn . . CMOS photonics for high-speed interconnects . . IEEE Micro , , 2006 . . 26 ( ( 2 ): ): 58 - - 66 . . DOI: 10.1109/MM.2006.32 http://doi.org/10.1109/MM.2006.32 . .

MW Haney . . How will photonic integrated circuits develop? . . Proc SPIE 8629, Silicon Photonics Ⅷ , , 2013 . . p.86290L DOI: 10.1117/12.2008352 http://doi.org/10.1117/12.2008352 . .

MJR Heck , , , JF Bauters , , , ML Davenport , , , 等 . . Hybrid silicon photonic integrated circuit technology . . IEEE J Sel Top Quant Electr , , 2013 . . 19 ( ( 4 ): ): 6100117 DOI: 10.1109/JSTQE.2012.2235413 http://doi.org/10.1109/JSTQE.2012.2235413 . .

CH Heung , , , MP Stoykovich , , , JZ Song , , , 等 . . A hemispherical electronic eye camera based on compressible silicon optoelectronics . . Nature , , 2008 . . 454 ( ( 7205 ): ): 748 - - 753 . . . .

JW Jeong , , , JG McCall , , , G Shin , , , 等 . . Wireless opto-fluidic systems for programmable in vivo pharmacology and optogenetics . . Cell , , 2015 . . 162 ( ( 3 ): ): 662 - - 674 . . DOI: 10.1016/j.cell.2015.06.058 http://doi.org/10.1016/j.cell.2015.06.058 . .

RH Kim , , , DH Kim , , , JL Xiao , , , 等 . . Waterproof AlInGaP optoelectronics on stretchable substrates with applications in biomedicine and robotics . . Nat Mater , , 2010 . . 9 ( ( 11 ): ): 929 - - 937 . . DOI: 10.1038/nmat2879 http://doi.org/10.1038/nmat2879 . .

TI Kim , , , JG McCall , , , YH Jung , , , 等 . . Injectable, cellular-scale optoelectronics with applications for wireless optogenetics . . Science , , 2013 . . 340 ( ( 6129 ): ): 211 - - 216 . . DOI: 10.1126/science.1232437 http://doi.org/10.1126/science.1232437 . .

HC Ko , , , MP Stoykovich , , , JZ Song , , , 等 . . A hemispherical electronic eye camera based on compressible silicon optoelectronics . . Nature , , 2008 . . 454 ( ( 7205 ): ): 748 - - 753 . . DOI: 10.1038/nature07113 http://doi.org/10.1038/nature07113 . .

HW Lee , , , MA Schmidt , , , RF Russell , , , 等 . . Pressure-assisted melt-filling and optical characterization of Au nano-wires in microstructured fibers . . Opt Expr , , 2011 . . 19 ( ( 13 ): ): 12180 - - 12189 . . DOI: 10.1364/OE.19.012180 http://doi.org/10.1364/OE.19.012180 . .

M Li , , , XF Chen , , , YK Su , , , 等 . . Photonic integration circuits in China . . IEEE J Quant Electr , , 2016 . . 52 ( ( 1 ): ): 0601017 DOI: 10.1109/JQE.2015.2504087 http://doi.org/10.1109/JQE.2015.2504087 . .

D Liang , , , JE Bowers . . Highly efficient vertical outgassing channels for low-temperature InP-to-silicon direct wafer bonding on the silicon-on-insulator substrate . . J Vac Sci Technol B , , 2008 . . 26 ( ( 4 ): ): 1560 DOI: 10.1116/1.2943667 http://doi.org/10.1116/1.2943667 . .

LY Lu , , , P Gutruf , , , L Xia , , , 等 . . Wireless optoelectronic photometers for monitoring neuronal dynamics in the deep brain . . Proc Nat Acad Sci USA , , 2018 . . 115 ( ( 7 ): ): E1374 - - E1383 . . DOI: 10.1073/pnas.1718721115 http://doi.org/10.1073/pnas.1718721115 . .

K Nomura , , , H Ohta , , , A Takagi , , , 等 . . Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors . . Nature , , 2004 . . 432 ( ( 7016 ): ): 488 - - 492 . . DOI: 10.1038/nature03090 http://doi.org/10.1038/nature03090 . .

R Ostendorf , , , G Kaufel , , , R Moritz , , , 等 . . 10 W high-efficiency high-brightness tapered diode lasers at 976 nm . . Proc SPIE 6876, High-Power Diode Laser Technology and Applications Ⅵ , , 2008 . . p.68760H DOI: 10.1117/12.761124 http://doi.org/10.1117/12.761124 . .

SI Park , , , JH Ahn , , , X Feng , , , 等 . . Theoretical and experimental studies of bending of inorganic electronic materials on plastic substrates . . Adv Funct Mater , , 2008 . . 18 ( ( 18 ): ): 2673 - - 2684 . . DOI: 10.1002/adfm.200800306 http://doi.org/10.1002/adfm.200800306 . .

VN Salimpoor , , , I van den Bosch , , , N Kovacevic , , , 等 . . Interactions between the nucleus accumbens and auditory cortices predict music reward value . . Science , , 2003 . . 340 ( ( 6129 ): ): 216 - - 219 . . DOI: 10.1126/science.1231059 http://doi.org/10.1126/science.1231059 . .

PJA Sazio , , , A Amezcua-Correa , , , CE Finlayson , , , 等 . . Microstructured optical fibers as high-pressure micro-fluidic reactors . . Science , , 2006 . . 311 ( ( 5767 ): ): 1583 - - 1586 . . DOI: 10.1126/science.1124281 http://doi.org/10.1126/science.1124281 . .

JR Sparks , , , PJA Sazio , , , V Gopalan , , , 等 . . Templated chemically deposited semiconductor optical fiber materials . . Ann Rev Mater Res , , 2013 . . 43 527 - - 557 . . DOI: 10.1146/annurev-matsci-073012-125958 http://doi.org/10.1146/annurev-matsci-073012-125958 . .

L Vivien , , , J Osmond , , , JM Fédéli . . 42 GHz p.i.n Germanium photodetector integrated in a silicon-on-insulator waveguide . . Opt Expr , , 2009 . . 17 ( ( 8 ): ): 6252 - - 6257 . . DOI: 10.1364/OE.17.006252 http://doi.org/10.1364/OE.17.006252 . .

ZB Wang , , , MG Helander , , , J Qiu , , , 等 . . Unlocking the full potential of organic light-emitting diodes on flexible plastic . . Nat Photon , , 2011 . . 5 ( ( 12 ): ): 753 - - 757 . . DOI: 10.1038/nphoton.2011.259 http://doi.org/10.1038/nphoton.2011.259 . .

W Yan , , , YP Qu , , , TD Gupta , , , 等 . . Semiconducting nanowire-based optoelectronic fibers . . Adv Mater , , 2017 . . 29 ( ( 27 ): ): 1700681 DOI: 10.1002/adma.201700681 http://doi.org/10.1002/adma.201700681 . .

W Yan , , , A Page , , , T Nguyen-Dang , , , 等 . . Advanced multimaterial electronic and optoelectronic fibers and textiles . . Adv Mater , , 2018 . . 31 ( ( 1 ): ): 1802348 DOI: 10.1002/adma.201802348 http://doi.org/10.1002/adma.201802348 . .

DR Yang . . Silicon Based Photoluminescence Materials and Devices , , : : Beijing Science Press , , 2016 . . .

JZ Yu , , , SW Chen , , , JS Xia , , , 等 . . Research progresses of SOI optical waveguide devices and integrated optical switch matrix . . Sci China Ser F , , 2005 . . 48 ( ( 2 ): ): 234 - - 246 . . DOI: 10.1360/04yf0311 http://doi.org/10.1360/04yf0311 . .

LJ Yuan , , , L Tao , , , WX Chen , , , 等 . . A buried ridge stripe structure InGaAsP-Si hybrid laser . . IEEE Photon Technol Lett , , 2015 . . 27 ( ( 4 ): ): 352 - - 355 . . DOI: 10.1109/LPT.2014.2372892 http://doi.org/10.1109/LPT.2014.2372892 . .

RH Zhai . . Novel photoelectron elements and technologies to support ROF . . ZTE Commun , , 2009 . . 15 ( ( 3 ): ): 11 - - 16 . . DOI: 10.3969/j.issn.1009-6868.2009.03.003 http://doi.org/10.3969/j.issn.1009-6868.2009.03.003 . .

NH Zhu , , , M Li , , , Y Hao . . Optoelectronic devices and integration technologies . . Sci Sin Inform , , 2016 . . 46 ( ( 8 ): ): 1156 - - 1174 . . DOI: 10.1360/N112016-00059 http://doi.org/10.1360/N112016-00059 . .

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