位移测量光栅干涉仪综述

胡鹏程; 常笛; 谭久彬; 杨睿韬; 杨宏兴; 付海金

doi:10.1631/FITEE.1800708

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位移测量光栅干涉仪综述

精密测量与仪器技术专题 | Updated：2022-05-19

- 位移测量光栅干涉仪综述
- Displacement measuring grating interferometer: a review
- 信息与电子工程前沿（英文） 2019年20卷第5期页码：631-654
- Affiliations：
  
  Center of Ultra-precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150080, China
  Key Lab of Ultra-precision Intelligent Instrumentation, Ministry of Industry and Information Technology, Harbin 150080, China
- Author bio：
  
  Jiu-bin TAN, E-mail: jbtan@hit.edu.cn
- Funds：
  
  Project supported by the National Natural Science Foundation of China (Nos. 51605120, 51675138, and 61675058) and the National Science and Technology Major Project, China (No. 2017ZX02101006-005)
- DOI：10.1631/FITEE.1800708
  中图分类号： TH744.3;TH822
- 收稿：2018-11-07，
  
  修回：2019-;5-;8，
  
  纸质出版：2019-05
- Accepted：
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胡鹏程, 常笛, 谭久彬, 等. 位移测量光栅干涉仪综述[J]. 信息与电子工程前沿（英文）, 2019,20(5):631-654.

Peng-cheng HU, Di CHANG, Jiu-bin TAN, et al. Displacement measuring grating interferometer: a review[J]. Frontiers of Information Technology & Electronic Engineering, 2019, 20(5): 631-654.
胡鹏程, 常笛, 谭久彬, 等. 位移测量光栅干涉仪综述[J]. 信息与电子工程前沿（英文）, 2019,20(5):631-654. DOI： 10.1631/FITEE.1800708.

Peng-cheng HU, Di CHANG, Jiu-bin TAN, et al. Displacement measuring grating interferometer: a review[J]. Frontiers of Information Technology & Electronic Engineering, 2019, 20(5): 631-654. DOI： 10.1631/FITEE.1800708.

摘要

Abstract

A grating interferometer

called the "optical encoder

" is a commonly used tool for precise displacement measurements. In contrast to a laser interferometer

a grating interferometer is insensitive to the air refractive index and can be easily applied to multi-degree-of-freedom measurements

which has made it an extensively researched and widely used device. Classified based on the measuring principle and optical configuration

a grating interferometer experiences three distinct stages of development: homodyne

heterodyne

and spatially separated heterodyne. Compared with the former two

the spatially separated heterodyne grating interferometer could achieve a better resolution with a feature of eliminating periodic nonlinear errors. Meanwhile

numerous structures of grating interferometers with a high optical fold factor

a large measurement range

good usability

and multi- degree-of-freedom measurements have been investigated. The development of incremental displacement measuring grating interferometers achieved in recent years is summarized in detail

and studies on error analysis of a grating interferometer are briefly introduced.

关键词

Keywords

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