
FOLLOWUS
1.Center of Ultra-precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin150080, China
2.Key Lab of Ultra-precision Intelligent Instrumentation (Harbin Institute of Technology), Ministry of Industry and Information Technology, Harbin150080, China
E-mail: di.chang@hit.edu.cn
‡Corresponding author
E-mail: jbtan@hit.edu.cn
收稿:2020-08-26,
修回:2021-10-09,
录用:2021-04-02,
纸质出版:2021-12-0
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常笛, 胡鹏程, 谭久彬. 六自由度光栅干涉仪中的无偏溯源角表达法[J]. 信息与电子工程前沿(英文), 2021,22(12):1677-1684.
Di CHANG, Pengcheng HU, Jiubin TAN. Fused-like angles: replacement for roll-pitch-yaw angles for asix-degree-of-freedom grating interferometer[J]. Frontiers of Information Technology & Electronic Engineering, 2021, 22(12): 1677-1684.
常笛, 胡鹏程, 谭久彬. 六自由度光栅干涉仪中的无偏溯源角表达法[J]. 信息与电子工程前沿(英文), 2021,22(12):1677-1684. DOI: 10.1631/FITEE.2000432.
Di CHANG, Pengcheng HU, Jiubin TAN. Fused-like angles: replacement for roll-pitch-yaw angles for asix-degree-of-freedom grating interferometer[J]. Frontiers of Information Technology & Electronic Engineering, 2021, 22(12): 1677-1684. DOI: 10.1631/FITEE.2000432.
光栅姿态角表达方法是六自由度光栅干涉测量的重要课题,但仅有少量相关研究。目前,广泛用于航空航天、导航和机器人领域的导航角(roll-pitch-yaw)被引入六自由度光栅干涉测量领域。然而,因导航角存在固有旋转顺序,在描述绕多个测量轴的复杂旋转时会引起溯源偏差,且该偏差随光栅偏摆角度增加而增大,并不符合干涉系统中的精确定义。基于机器人领域的融合角(fused angles)表达法,本文提出“无偏溯源角(fused-like angles)”表达法,因无偏溯源角不会引起溯源偏差,更加符合光栅干涉仪中的定义,从而更适合六自由度测量。提出的无偏溯源角已应用于六自由度光栅干涉的运动模型和解耦算法研究。
Representation of orientation is important in a six-degree-of-freedom grating interferometer but only a few studies have focused on this topic. Roll-pitch-yaw angles
widely used in aviation
navigation
and robotics
are now being brought to the field of multi-degree-of-freedom interferometric measurement. However
the roll-pitch-yaw angles are not the exact definitions the metrologists expected in interferometry
because they require a certain sequential order of rotations and may cause errors in describing complicated rotations. The errors increase as the tip and tilt angles of the grating increase. Therefore
a replacement based on fused angles in robotics is proposed and named "fused-like angles." The fused-like angles are error-free
so they are more in line with the definitions in grating interferometry and more suitable for six-degree-of-freedom measurements. Fused-like angles have already been used in research on the kinematic model and decoupling algorithm of the six-degree-of-freedom grating interferometer.
P Allgeuer , , S Behnke , . 2015 . . Fused angles: a representation of body orientation for balance . . IEEE/RSJ Int Conf on Intelligent Robots and Systems , p. . 366 - - 373 . . doi: 10.1109/IROS.2015.7353399 http://doi.org/10.1109/IROS.2015.7353399 .
P Allgeuer , , S Behnke , . 2018 . . Fused angles and the deficiencies of Euler angles . . IEEE/RSJ Int Conf on Intelligent Robots and Systems , p. . 5109 - - 5116 . . doi: 10.1109/IROS.2018.8593384 http://doi.org/10.1109/IROS.2018.8593384 .
D Chang , , X Xing , , PC Hu , , et al. , . 2019 . . Double-diffracted spatially separated heterodyne grating interferometer and analysis on its alignment tolerance . . Appl Sci , , 9 ( ( 2 ): ): 263 . doi: 10.3390/app9020263 http://doi.org/10.3390/app9020263 .
F Cheng , , KC Fan , . 2011 . . Linear diffraction grating interferometer with high alignment tolerance and high accuracy . . Appl Opt , , 50 ( ( 22 ): ): 4550 - - 4556 . . doi: 10.1364/AO.50.004550 http://doi.org/10.1364/AO.50.004550 .
F de Jong , , B van der Pasch , , T Castenmiller , , et al. , . 2009 . . Enabling the lithography roadmap: an immersion tool based on a novel stage positioning system . . Proc Optical Microlithography XXII, 7274 : . 72741S . doi: 10.1117/12.814254 http://doi.org/10.1117/12.814254 .
HL Hsieh , , SW Pan , . 2015 . . Development of a grating-based interferometer for six-degree-of-freedom displacement and angle measurements . . Opt Expr , , 23 ( ( 3 ): ): 2451 - - 2465 . . doi: 10.1364/OE.23.002451 http://doi.org/10.1364/OE.23.002451 .
PC Hu , , D Chang , , JB Tan , , et al. , . 2019 . . Displacement measuring grating interferometer: a review . . Front Inform Technol Electron Eng , , 20 ( ( 5 ): ): 631 - - 654 . . doi: 10.1631/FITEE.1800708 http://doi.org/10.1631/FITEE.1800708 .
XH Li , , Y Shimizu , , T Ito , , et al. , . 2014 . . Measurement of six-degree-of-freedom planar motions by using a multiprobe surface encoder . . Opt Eng , , 53 ( ( 12 ): ): 122405 . doi: 10.1117/1.OE.53.12.122405 http://doi.org/10.1117/1.OE.53.12.122405 .
WN Ye , , M Zhang , , Y Zhu , , et al. , . 2018 . . Translational displacement computational algorithm of the grating interferometer without geometric error for the wafer stage in a photolithography scanner . . Opt Expr , , 26 ( ( 26 ): ): 34734 - - 34752 . . doi: 10.1364/OE.26.034734 http://doi.org/10.1364/OE.26.034734 .
WN Ye , , M Zhang , , Y Zhu , , et al. , . 2019 . . Ultraprecision real-time displacements calculation algorithm for the grating interferometer system . . Sensors , , 19 ( ( 10 ): ): 2409 . doi: 10.3390/s19102409 http://doi.org/10.3390/s19102409 .
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