Modeling and noise analysis of a fence structure micromachined capacitive accelerometer system

Xia ZHANG; Hao WANG; Xu-dong ZHENG; Shi-chang HU; Zhong-he JIN

doi:10.1631/jzus.C0910757

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Modeling and noise analysis of a fence structure micromachined capacitive accelerometer system

微电子 | Updated：2022-08-31

- Modeling and noise analysis of a fence structure micromachined capacitive accelerometer system
- Modeling and noise analysis of a fence structure micromachined capacitive accelerometer system
- 信息与电子工程前沿（英文） 2010年11卷第12期页码：1009-1015
- Affiliations：
  
  1.Department of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China
  2.Beijing Institute of Aerospace Control Devices, Beijing 100854, China
- Author bio：
  
  E-mail:d05zhangxia@zju.edu.cn
- Funds：
- DOI：10.1631/jzus.C0910757
  中图分类号：
- 收稿：2009-12-10，
  
  修回：2010-11-04，
  
  录用：2010-03-26，
  
  纸质出版：2010-12
- Accepted：
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Modeling and noise analysis of a fence structure micromachined capacitive accelerometer system[J]. 信息与电子工程前沿（英文）, 2010,11(12):1009-1015.

Xia ZHANG, Hao WANG, Xu-dong ZHENG, et al. Modeling and noise analysis of a fence structure micromachined capacitive accelerometer system[J]. Frontiers of Information Technology & Electronic Engineering, 2010, 11(12): 1009-1015.
Modeling and noise analysis of a fence structure micromachined capacitive accelerometer system[J]. 信息与电子工程前沿（英文）, 2010,11(12):1009-1015. DOI： 10.1631/jzus.C0910757.

Xia ZHANG, Hao WANG, Xu-dong ZHENG, et al. Modeling and noise analysis of a fence structure micromachined capacitive accelerometer system[J]. Frontiers of Information Technology & Electronic Engineering, 2010, 11(12): 1009-1015. DOI： 10.1631/jzus.C0910757.

摘要

Abstract

We analyze the effects of possible noise sources on a fence structure micromachined capacitive accelerometer system by modeling and simulation to improve its performance. Simulation results show that a mismatch between the two initial sensing capacitors of the accelerometer or a mismatch between the two capacitance-voltage conversion circuits has a great effect on the output noise floor. When there is a serious mismatch

the noise induced by a sinusoidal carrier is the major noise source. When there is no or only a slight mismatch

the differential capacitance-voltage conversion circuits become the main noise source. The simulation results were validated by experiments and some effective approaches are proposed to improve the system resolution.

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