Microfabrication technology for non-coplanar resonant beams and crab-leg supporting beams of dual-axis bulk micromachined resonant accelerometers

Jian-qiang HAN; Ri-sheng FENG; Yan LI; Sen-lin LI; Qing LI

doi:10.1631/jzus.C1200251

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Microfabrication technology for non-coplanar resonant beams and crab-leg supporting beams of dual-axis bulk micromachined resonant accelerometers

电气与电子工程 | Updated：2022-12-09

- Microfabrication technology for non-coplanar resonant beams and crab-leg supporting beams of dual-axis bulk micromachined resonant accelerometers
- Microfabrication technology for non-coplanar resonant beams and crab-leg supporting beams of dual-axis bulk micromachined resonant accelerometers
- 信息与电子工程前沿（英文） 2013年14卷第1期页码：65-74
- Affiliations：
  
  College of Mechanical & Electrical Engineering, China Jiliang University, Hangzhou 310018, China
- Author bio：
  
  Jian-qiang HAN, E-mail: hjqsmx@sina.com
- Funds：
  
  Project (No. 61076110) supported by the National Natural Science Foundation of China
- DOI：10.1631/jzus.C1200251
  中图分类号： TP212
- 收稿：2012-08-24，
  
  修回：2012-12-14，
  
  纸质出版：2013-01
- Accepted：
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Microfabrication technology for non-coplanar resonant beams and crab-leg supporting beams of dual-axis bulk micromachined resonant accelerometers[J]. 信息与电子工程前沿（英文）, 2013,14(1):65-74.

Jian-qiang HAN, Ri-sheng FENG, Yan LI, et al. Microfabrication technology for non-coplanar resonant beams and crab-leg supporting beams of dual-axis bulk micromachined resonant accelerometers[J]. Frontiers of Information Technology & Electronic Engineering, 2013, 14(1): 65-74.
Microfabrication technology for non-coplanar resonant beams and crab-leg supporting beams of dual-axis bulk micromachined resonant accelerometers[J]. 信息与电子工程前沿（英文）, 2013,14(1):65-74. DOI： 10.1631/jzus.C1200251.

Jian-qiang HAN, Ri-sheng FENG, Yan LI, et al. Microfabrication technology for non-coplanar resonant beams and crab-leg supporting beams of dual-axis bulk micromachined resonant accelerometers[J]. Frontiers of Information Technology & Electronic Engineering, 2013, 14(1): 65-74. DOI： 10.1631/jzus.C1200251.

摘要

Abstract

This paper presents the design principles and fabrication techniques for simultaneously forming non-coplanar resonant beams and crab-leg supporting beams of dual-axis bulk micromachined resonant accelerometers by masked-maskless combined anisotropic etching. Four resonant beams are located at the surface of a silicon substrate

whereas the gravity centre of a proof mass lies within the neutral plane of four crab-leg supporting beams on the same substrate. Compared with early reported mechanical structures

the simple structure not only eliminates the bending moments caused by in-plane acceleration

and thereby avoiding the rotation of the proof mass

but also providing sufficiently small rigidity to

and

axes accelerations

potentially leading to a large sensitivity for measuring the in-plane acceleration.

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references

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