A planar capacitive sensor for 2D long-range displacement measurement

Jian-ping YU; Wen WANG; Ke-qing LU; De-qing MEI; Zi-chen CHEN

doi:10.1631/jzus.C12MNT03

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A planar capacitive sensor for 2D long-range displacement measurement

中国微纳技术学会专题，CSMNT2012 | Updated：2022-05-19

- A planar capacitive sensor for 2D long-range displacement measurement
- A planar capacitive sensor for 2D long-range displacement measurement
- 信息与电子工程前沿（英文） 2013年14卷第4期页码：252-257
- Affiliations：
  
  1.Department of Mechanical Engineering, Zhejiang University, Hangzhou 310027, China
  2.School of Mechanical Engineering, Hangzhou Dianzi University, Hangzhou 310018, China
- Author bio：
  
  WANG Wen, E-mail: wangwn@hdu.edu.cn
- Funds：
  
  Project supported by the National Natural Science Foundation of China (No. 51275465), the National Basic Research Program (973) of China (No. 2011CB013300), and the Scientific Research Foundation for the Returned Overseas Chinese Scholars, Ministry of Education, China (No. [2011]1568)
- DOI：10.1631/jzus.C12MNT03
  中图分类号： TH711;TB92
- 收稿：2012-10-09，
  
  修回：2013-;3-11，
  
  纸质出版：2013-04
- Accepted：
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A planar capacitive sensor for 2D long-range displacement measurement[J]. 信息与电子工程前沿（英文）, 2013,14(4):252-257.

Jian-ping YU, Wen WANG, Ke-qing LU, et al. A planar capacitive sensor for 2D long-range displacement measurement[J]. Frontiers of Information Technology & Electronic Engineering, 2013, 14(4): 252-257.
A planar capacitive sensor for 2D long-range displacement measurement[J]. 信息与电子工程前沿（英文）, 2013,14(4):252-257. DOI： 10.1631/jzus.C12MNT03.

Jian-ping YU, Wen WANG, Ke-qing LU, et al. A planar capacitive sensor for 2D long-range displacement measurement[J]. Frontiers of Information Technology & Electronic Engineering, 2013, 14(4): 252-257. DOI： 10.1631/jzus.C12MNT03.

摘要

Abstract

A planar capacitive sensor (PCS) capable of 2D large-scale measurement is presented in this paper. Displacement interpretation depends on independently measuring the periodic variation in capacitance caused by the change in the overlapping area of sensing electrodes on a moving plate and a fixed plate. By accumulating the number of quarters in each direction and the specific position in the final quarter

the large-scale measurement is fulfilled. Displacements in

- and

-direction can be measured independently and simultaneously. Simulation shows that a shorter gap distance and a longer electrode guarantee better sensitivity. Experiments based on a PCS test bench demonstrate that the PCS has a sensitivity of 0.198 mV/μm and a resolution of 0.308 μm. An electric fringe effect and other possible measurement errors on displacement interpretation accuracy are discussed. The study confirms the high potential of PCSs as innovative 2D long-range displacement sensors.

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references

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