Measurement of wireless pressure sensors fabricated in high temperature co-fired ceramic MEMS technology

Ji-jun XIONG; Shi-jun ZHENG; Ying-ping HONG; Jun LI; Ying-lin WANG; Wei WANG; Qiu-lin TAN

doi:10.1631/jzus.C12MNT04

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Measurement of wireless pressure sensors fabricated in high temperature co-fired ceramic MEMS technology

中国微纳技术学会专题，CSMNT2012 | Updated：2022-12-09

- Measurement of wireless pressure sensors fabricated in high temperature co-fired ceramic MEMS technology
- Measurement of wireless pressure sensors fabricated in high temperature co-fired ceramic MEMS technology
- 信息与电子工程前沿（英文） 2013年14卷第4期页码：258-263
- Affiliations：
  
  1.Key Laboratory of Instrumentation Science & Dynamic Measurement, North University of China, Taiyuan 030051, China
  2.MOE Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan 030051, China
  3.The Second Research Institute of China Electronics Technology Group Corporation, Taiyuan 030024, China
- Author bio：
  
  [ "XIONG Ji-jun, E-mail: xiongjijun@nuc.edu.cn" ]
  TANQiu-lin, tanqiulin.99@163.com
- Funds：
  
  Project supported by the National Basic Research Program (973) of China (No. 2010CB334703) and the National Natural Science Foundation of China (No. 51075375)
- DOI：10.1631/jzus.C12MNT04
  中图分类号： TP212
- 收稿：2012-09-20，
  
  修回：2013-;3-12，
  
  纸质出版：2013-04
- Accepted：
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Measurement of wireless pressure sensors fabricated in high temperature co-fired ceramic MEMS technology[J]. 信息与电子工程前沿（英文）, 2013,14(4):258-263.

Ji-jun XIONG, Shi-jun ZHENG, Ying-ping HONG, et al. Measurement of wireless pressure sensors fabricated in high temperature co-fired ceramic MEMS technology[J]. Frontiers of Information Technology & Electronic Engineering, 2013, 14(4): 258-263.
Measurement of wireless pressure sensors fabricated in high temperature co-fired ceramic MEMS technology[J]. 信息与电子工程前沿（英文）, 2013,14(4):258-263. DOI： 10.1631/jzus.C12MNT04.

Ji-jun XIONG, Shi-jun ZHENG, Ying-ping HONG, et al. Measurement of wireless pressure sensors fabricated in high temperature co-fired ceramic MEMS technology[J]. Frontiers of Information Technology & Electronic Engineering, 2013, 14(4): 258-263. DOI： 10.1631/jzus.C12MNT04.

摘要

Abstract

High temperature co-fired ceramics (HTCCs) have wide applications with stable mechanical properties

but they have not yet been used to fabricate sensors. By introducing the wireless telemetric sensor system and ceramic structure embedding a pressure-deformable cavity

the designed sensors made from HTCC materials (zirconia and 96% alumina) are fabricated

and their capacities for the pressure measurement are tested using a wireless interrogation method. Using the fabricated sensor

a study is conducted to measure the atmospheric pressure in a sealed vessel. The experimental sensitivity of the device is 2 Hz/Pa of zirconia and 1.08 Hz/Pa of alumina below 0.5 MPa with a readout distance of 2.5 cm. The described sensor technology can be applied for monitoring of atmospheric pressure to evaluate important component parameters in harsh environments.

关键词

Keywords

references

E. Birdsell , , , M.G. Allen . . Wireless Chemical Sensors for High Temperature Environments . . Solid-State Sensors, Actuatos, and Microsystems Workshop , , 2006 . . p.212 - - 215 . . . .

E. Birdsell , , , J. Park , , , M. Allen . . Wireless Ceramic Sensors Operating in High Temperature Environments . . 40th AIAA/ASME/SAE/ASEE Joint Propulsion Conf. and Exhibit , , 2004 . . .

H. Birol , , , T. Maeder , , , P. Ryser . . Processing of graphite- based sacrificial layer for microfabrication of low temperature co-fired ceramic (LTCC) . . Sens. Actuat. A , , 2006 . . 130-131 560 - - 567 . . DOI: 10.1016/j.sna.2005.12.009 http://doi.org/10.1016/j.sna.2005.12.009 . .

P. Chen . . Implantable Wireless Intraocular Pressure Sensor . . PhD Thesis, California Institute of Technology , , 2008 . . p.6 - - 27 . . . .

P.J. Chen , , , D.C. Rodger , , , S. Saati , , , M.S. Humayun , , , Y.C. Tai . . Microfabricated implantable parylene-based wireless passive intraocular pressure sensors . . J. Microelectromech. Syst. , , 2008 . . 17 ( ( 6 ): ): 1342 - - 1351 . . DOI: 10.1109/JMEMS.2008.2004945 http://doi.org/10.1109/JMEMS.2008.2004945 . .

W.F. Cullinane , , , R.R. Strange . . Gas turbine engine validation instrumentation: measurements, sensors, and needs . . SPIE , , 1999 . . 3852 2 - - 13 . . DOI: 10.1117/12.372833 http://doi.org/10.1117/12.372833 . .

M.A. Fonseca . . Polymer/Ceramic Wireless MEMS Pressure Sensors for Harsh Environments: High Temperature and Biomedical Applications . . PhD Thesis, Georgia Institute of Technology , , 2007 . . .

M.A. Fonseca , , , J. English , , , M. Allen . . Wireless micro- machined ceramic pressure sensor for high temperature application . . J. Microelectromech.Syst , , 2002 . . 8 ( ( 4 ): ): 1 - - 3 . . DOI: 10.1109/JMEMS.2002.800939 http://doi.org/10.1109/JMEMS.2002.800939 . .

Y. Imanaka . . Multilayered Low Temperature Cofired Ceramics (LTCC) Technology , , : : New York Springer , , 2004 . . .

K. Malecha , , , L. Golonka . . Microchannel fabrication process in LTCC ceramic . . Microelectron. Rel. , , 2008 . . 48 ( ( 6 ): ): 866 - - 871 . . DOI: 10.1016/j.microrel.2008.03.013 http://doi.org/10.1016/j.microrel.2008.03.013 . .

J.B. Ong , , , Z. You , , , J. Mills-Beale , , , E.L. Tan , , , B.D. Pereles , , , K.G. Ong . . A wireless, passive embedded sensor for real-time monitoring of water content in civil engineering materials . . IEEE Sens. J. , , 2008 . . 8 ( ( 12 ): ): 2053 - - 2058 . . DOI: 10.1109/JSEN.2008.2007681 http://doi.org/10.1109/JSEN.2008.2007681 . .

W.J. Pulliam , , , P.M. Russler , , , R.S. Fielder . . High temperature high-bandwidth fiber-optic MEMS pressure- sensor technology for turbine engine component testing . . SPIE , , 2002 . . 4578 229 - - 238 . . DOI: 10.1117/12.456079 http://doi.org/10.1117/12.456079 . .

G.J. Radosavljevic , , , L.D. Zivanov , , , W. Smetana , , , A.M. Maric , , , M. Unger , , , L.F. Nad . . A wireless embedded resonant pressure sensors fabricated in the LTCC technology . . IEEE Sens. J , , 2009 . . 9 ( ( 12 ): ): 1956 - - 1962 . . DOI: 10.1109/JSEN.2009.2030974 http://doi.org/10.1109/JSEN.2009.2030974 . .

S. Timoshenko . . Theory of Plates and Shells , , : : London McGraw Hill , , 1984 . . .

R.L. Wahlers , , , S.J. Stein , , , A.H. Feingold , , , P.W. Bless . . Ceramic Tapes for Wireless Applications . . Available from , , http://electro-science.com/publications/ACerS%20St.Louis'00.pdf http://electro-science.com/publications/ACerS%20St.Louis'00.pdf , , [Accessed on June 2, 2012] 2012 . . .

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