High-precision low-power quartz tuning fork temperature sensor with optimized resonance excitation

Jun XU; Xin LI; Jin-hua DUAN; Hai-bo XU

doi:10.1631/jzus.C12MNT05

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High-precision low-power quartz tuning fork temperature sensor with optimized resonance excitation

中国微纳技术学会专题，CSMNT2012 | Updated：2022-12-09

- High-precision low-power quartz tuning fork temperature sensor with optimized resonance excitation
- High-precision low-power quartz tuning fork temperature sensor with optimized resonance excitation
- 信息与电子工程前沿（英文） 2013年14卷第4期页码：264-273
- Affiliations：
  
  1.College of Automation, Harbin University of Science and Technology, Harbin 150080, China
  2.Compute Center, Harbin University of Science and Technology, Harbin 150080, China
- Author bio：
  
  [ "XU Jun, E-mail: hljlgxj@126.com" ]
  [ "LI Xin, lixin68@hrbust.edu.cn" ]
- Funds：
  
  Project (No. 11551074) supported by the Science Research Fund of Heilongjiang Provincial Education Department, China
- DOI：10.1631/jzus.C12MNT05
  中图分类号： TP212.1
- 收稿：2012-10-08，
  
  修回：2013-;3-18，
  
  纸质出版：2013-04
- Accepted：
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High-precision low-power quartz tuning fork temperature sensor with optimized resonance excitation[J]. 信息与电子工程前沿（英文）, 2013,14(4):264-273.

Jun XU, Xin LI, Jin-hua DUAN, et al. High-precision low-power quartz tuning fork temperature sensor with optimized resonance excitation[J]. Frontiers of Information Technology & Electronic Engineering, 2013, 14(4): 264-273.
High-precision low-power quartz tuning fork temperature sensor with optimized resonance excitation[J]. 信息与电子工程前沿（英文）, 2013,14(4):264-273. DOI： 10.1631/jzus.C12MNT05.

Jun XU, Xin LI, Jin-hua DUAN, et al. High-precision low-power quartz tuning fork temperature sensor with optimized resonance excitation[J]. Frontiers of Information Technology & Electronic Engineering, 2013, 14(4): 264-273. DOI： 10.1631/jzus.C12MNT05.

摘要

Abstract

This paper presents the design

fabrication

and characterization of a quartz tuning fork temperature sensor based on a new ZY-cut quartz crystal bulk acoustic wave resonator vibrating in a flexural mode. Design and performance analysis of the quartz tuning fork temperature sensor were conducted and the thermal sensing characteristics were examined by measuring the resonance frequency shift of this sensor caused by an external temperature. Finite element method is used to analyze the vibratory modes and optimize the structure of the sensor. The sensor prototype was successfully fabricated and calibrated in operation from 0 to 100 ℃ with the thermo-sensitivity of 70×10

-6

/℃. Experimental results show that the sensor has high thermo-sensitivity

good stability

and good reproducibility. This work presents a high-precision low-power temperature sensor using the comprehensive thermal characterization of the ZY-cut quartz tuning fork resonator.

关键词

Keywords

references

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