A trapezoidal cantilever density sensor based on MEMS technology

Li-bo ZHAO; Long-qi XU; Gui-ming ZHANG; Yu-long ZHAO; Xiao-po WANG; Zhi-gang LIU; Zhuang-de JIANG

doi:10.1631/jzus.C12MNT06

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A trapezoidal cantilever density sensor based on MEMS technology

中国微纳技术学会专题，CSMNT2012 | Updated：2022-12-09

- A trapezoidal cantilever density sensor based on MEMS technology
- A trapezoidal cantilever density sensor based on MEMS technology
- 信息与电子工程前沿（英文） 2013年14卷第4期页码：274-278
- Affiliations：
  
  1.State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China
  2.MOE Key Laboratory of Thermo-Fluid Science and Engineering, Xi'an Jiaotong University, Xi'an 710049, China
- Author bio：
  
  [ "ZHAO Li-bo, E-mail: libozhao@mail.xjtu.edu.cn" ]
  [ "XU Long-qi, hezexulongqi@stu.xjtu.edu.cn" ]
- Funds：
  
  Project supported by the National Natural Science Foundation of China (Nos. 50836004, 50905139, and 90923001), the Fun-damental Research Funds for the Central Universities (No. xjj20100140), the Science and Technology Research Project of Shaanxi Province (No. 2012KJXX-01), the Program of Changjiang Scholars and Innovative Research Team in University (No. IRT1033), and the 111 Program (No. B12016), China
- DOI：10.1631/jzus.C12MNT06
  中图分类号： TH81
- 收稿：2012-09-24，
  
  修回：2013-;3-22，
  
  纸质出版：2013-04
- Accepted：
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A trapezoidal cantilever density sensor based on MEMS technology[J]. 信息与电子工程前沿（英文）, 2013,14(4):274-278.

Li-bo ZHAO, Long-qi XU, Gui-ming ZHANG, et al. A trapezoidal cantilever density sensor based on MEMS technology[J]. Frontiers of Information Technology & Electronic Engineering, 2013, 14(4): 274-278.
A trapezoidal cantilever density sensor based on MEMS technology[J]. 信息与电子工程前沿（英文）, 2013,14(4):274-278. DOI： 10.1631/jzus.C12MNT06.

Li-bo ZHAO, Long-qi XU, Gui-ming ZHANG, et al. A trapezoidal cantilever density sensor based on MEMS technology[J]. Frontiers of Information Technology & Electronic Engineering, 2013, 14(4): 274-278. DOI： 10.1631/jzus.C12MNT06.

摘要

Abstract

A trapezoidal cantilever density sensor is developed based on micro-electro-mechanical systems (MEMS) technology. The sensor measures fluid density through the relationship between the density and the resonant frequency of the cantilever immersed in the fluid. To improve the sensitivity of the sensor

the modal and harmonic response analyses of trapezoidal and rectangular cantilevers are simulated by ANSYS software. The higher the resonant frequency of the cantilever immersed in the fluid

the higher the sensitivity of the sensor; the higher the resonant strain value

the easier the detection of the output signal of the sensor. Based on the results of simulation

the trapezoidal cantilever is selected to measure the densities of dimethyl silicone and toluene at the temperature ranges of 30 to 55 ℃ and 26 to 34 ℃

respectively. Experimental results show that the trapezoidal cantilever density sensor has a good performance.

关键词

Keywords

references

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