Resin-bonded NdFeB micromagnets for integration into electromagnetic vibration energy harvesters

Pei-hong WANG; Kai TAO; Zhuo-qing YANG; Gui-fu DING

doi:10.1631/jzus.C12MNT08

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Resin-bonded NdFeB micromagnets for integration into electromagnetic vibration energy harvesters

中国微纳技术学会专题，CSMNT2012 | Updated：2022-12-09

- Resin-bonded NdFeB micromagnets for integration into electromagnetic vibration energy harvesters
- Resin-bonded NdFeB micromagnets for integration into electromagnetic vibration energy harvesters
- 信息与电子工程前沿（英文） 2013年14卷第4期页码：283-287
- Affiliations：
  
  1.School of Physics and Material Science, Anhui University, Hefei 230039, China
  2.Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200240, China
- Author bio：
  
  [ "WANG Pei-hong, E-mail: wangpeihong2002@ahu.edu.cn" ]
- Funds：
  
  Project supported by the National Natural Science Foundation of China (No. 51007001), the 211 Project of Anhui University, and the Start Up Grant for Doctor's Research of Anhui University, China
- DOI：10.1631/jzus.C12MNT08
  中图分类号： TM27;TM619
- 收稿：2012-09-10，
  
  修回：2013-;3-18，
  
  纸质出版：2013-04
- Accepted：
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Resin-bonded NdFeB micromagnets for integration into electromagnetic vibration energy harvesters[J]. 信息与电子工程前沿（英文）, 2013,14(4):283-287.

Pei-hong WANG, Kai TAO, Zhuo-qing YANG, et al. Resin-bonded NdFeB micromagnets for integration into electromagnetic vibration energy harvesters[J]. Frontiers of Information Technology & Electronic Engineering, 2013, 14(4): 283-287.
Resin-bonded NdFeB micromagnets for integration into electromagnetic vibration energy harvesters[J]. 信息与电子工程前沿（英文）, 2013,14(4):283-287. DOI： 10.1631/jzus.C12MNT08.

Pei-hong WANG, Kai TAO, Zhuo-qing YANG, et al. Resin-bonded NdFeB micromagnets for integration into electromagnetic vibration energy harvesters[J]. Frontiers of Information Technology & Electronic Engineering, 2013, 14(4): 283-287. DOI： 10.1631/jzus.C12MNT08.

摘要

Abstract

A micromachining technique is presented for the fabrication of resin-bonded permanent magnets in the microscale. Magnetic paste is prepared from NdFeB powder and an epoxy resin

filled into lithographically defined photoresist molds or metal molds

and formed into resin-bonded magnets after curing at room temperature. A coercivity of 772.4 kA/m

a remanence of 0.27 T

and a maximum energy product of 22.6 kJ/m

have been achieved in an NdFeB disk micromagnet with dimensions of Ф200 μm×70 μm. Based on the developed micro-patterning of resin-bonded magnets

a fully integrated electromagnetic vibration energy harvester has been designed and fabricated. The dimensions of the energy harvester are only 4.5 mm×4.5 mm×1.0 mm

and those of the micromagnet are 1.5 mm×1.5 mm×0.2 mm. This microfabrication technique can be used for producing permanent magnets tens or hundreds of micrometers in size for use in various magnetic devices.

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references

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