一种用于位移传感器的数字莫尔方法

Jian WU; Ting-ting ZHOU; Bo YUAN; Li-qiang WANG

doi:10.1631/FITEE.1500270

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一种用于位移传感器的数字莫尔方法

常规文章 | Updated：2022-05-19

- 一种用于位移传感器的数字莫尔方法
- A digital moiré fringe method for displacement sensors
- 信息与电子工程前沿（英文） 2016年17卷第9期页码：946-953
- Affiliations：
  
  State Key Laboratory of Modern Optical Instrumentation, CNERC for Optical Instrument, Zhejiang University, Hangzhou, 310027, China
- Author bio：
  
  E-mail:yuanbo@zju.edu.cn
- Funds：
  
  Project supported by the National Natural Science Foundation of China (No. 61205159)
- DOI：10.1631/FITEE.1500270
  中图分类号： TH741; TN911.7
- 收稿：2016-08-19，
  
  录用：2016-2-16，
  
  纸质出版：2016-09
- Accepted：
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一种用于位移传感器的数字莫尔方法[J]. 信息与电子工程前沿（英文）, 2016,17(9):946-953.

Jian WU, Ting-ting ZHOU, Bo YUAN, et al. A digital moiré fringe method for displacement sensors[J]. Frontiers of Information Technology & Electronic Engineering, 2016, 17(9): 946-953.
一种用于位移传感器的数字莫尔方法[J]. 信息与电子工程前沿（英文）, 2016,17(9):946-953. DOI： 10.1631/FITEE.1500270.

Jian WU, Ting-ting ZHOU, Bo YUAN, et al. A digital moiré fringe method for displacement sensors[J]. Frontiers of Information Technology & Electronic Engineering, 2016, 17(9): 946-953. DOI： 10.1631/FITEE.1500270.

摘要

目的

在传统莫尔条纹技术的基础上，提出一种装调方便、分辨率可调节的位移测量技术。

创新点

仅使用一块光栅，利用图像处理技术生成数字莫尔条纹，从而既具有传统莫尔条纹技术的优点，又方便装调和系统分辨率设置。

方法

首先，利用面阵探测器接收光栅的放大像，并将图像信号送入计算机中。然后，将光栅像与其镜像像进行叠加产生数字莫尔条纹，并对条纹信号进行积分以得到数字莫尔曲线。最后，利用特殊设计算法估计条纹移动前后的相位差，并根据相位差计算位移量。本文根据所提出的方法构建了一套位移测量系统，对系统的稳定性、灵敏度和测量精度进行了测试。

结论

提出了一种基于数字莫尔条纹技术的位移测量方法，它既具有传统莫尔条纹技术的位移放大和误差平均的优点，又装调方便且可灵活调节分辨率。通过实验验证了该方法的可行性。

Abstract

In this study

a displacement measurement method based on digital moiré fringe is described and experimentally demonstrated. The method is formed by only one grating with a constant pitch. First

the magnified grating image is received by an imaging array and is sent to a computer. Then

the digital moiré fringes are generated by overlaying the grating image with its mirrored one. Finally

a specifically designed algorithm is used to obtain the fringes' phase difference before and after movement and calculate the displacement. This method has the effects of amplifying displacement and averaging the grating lines error

the same as the traditional moiré technique using two pieces of gratings. At the same time

the proposed system is much easier to assemble and the measurement resolution can be set more flexibly. One displacement measuring system based on this method was built up. Experiment results show that its measurement errors are less than 0.3 µm and less than 0.12 µm at the resolutions of 0.1 µm and 0.03 µm

respectively.

关键词

Keywords

references

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